Method for manufacturing pixel definition layer and display panel, and display panel
A method for manufacturing the pixel definition layer includes forming a photolithographic material film on a substrate; performing a pre-drying treatment, a first exposure treatment, and a development treatment sequentially on the photolithographic material film to form an initial pattern of the pixel definition layer; and performing a second exposure treatment and a curing treatment sequentially on the initial pattern to form a final pattern of the pixel definition layer.
1. A method for manufacturing a pixel definition layer, comprising:
forming a photolithographic material film on a substrate;
performing a first exposure treatment and a development treatment sequentially on the photolithographic material film to form an initial pattern of the pixel definition layer; and
performing a second exposure treatment and a curing treatment sequentially on the initial pattern to form a final pattern of the pixel definition layer, wherein the second exposure treatment decomposes photosensitizer in the initial pattern to decompose chain molecules of the photosensitizer into molecules smaller than the chain molecules, so as to enhance fluidity of photolithographic material of the photolithographic material film in the curing treatment to correct an edge contour of the initial pattern, to reduce a formed slope angle of the final pattern of the pixel definition layer.
2. The method according to claim 1 , wherein performing the second exposure treatment on the initial pattern comprises: performing the second exposure treatment on the initial pattern by using an I-line ultraviolet light.
3. The method according to claim 2 , wherein an illumination intensity of the I-line ultraviolet light is 120 mW/cm 2 to 250 mW/cm 2 .
4. The method according to claim 1 , wherein performing the second exposure treatment on the initial pattern comprises: exposing the initial pattern by using a photo-mask that exposes at least side surfaces of the initial pattern.
5. The method according to claim 1 , further comprising performing pre-drying treatment on the photolithographic material film before performing the first exposure treatment on the photolithographic material film.
6. The method according to claim 5 , further comprising performing vacuum drying treatment on the photolithographic material film before performing the pre-drying treatment on the photolithographic material film.
7. The method according to claim 6 , wherein the vacuum drying treatment comprises a plurality of treatment stages, and pressures at the treatment stages are sequentially reduced.
8. The method according to claim 7 , wherein the pressure at a final treatment stage of the treatment stages is 300 Pa to 700 Pa.
9. The method according to claim 6 , wherein a total working time used in the vacuum drying treatment is 110 s to 130 s.
10. The method according to claim 1 , wherein a thickness of the photolithographic material film is 1.8 μm-4.5 μm.
11. A method for manufacturing a display panel, comprising:
forming a pixel definition layer on a substrate, comprising:
forming a photolithographic material film on a substrate;
performing a first exposure treatment and a development treatment sequentially on the photolithographic material film to form an initial pattern of the pixel definition layer;
performing a second exposure treatment and a curing treatment sequentially on the initial pattern to form a final pattern of the pixel definition layer;
forming a light-emitting layer in an opening area on the pixel definition layer; and
forming a packaging layer on the light-emitting layer,
wherein the second exposure treatment decomposes photosensitizer in the initial pattern to decompose chain molecules of the photosensitizer into molecules smaller than the chain molecules, so as to enhance fluidity of photolithographic material of the photolithographic material film in the curing treatment to correct an edge contour of the initial pattern, to reduce a formed slope angle of the final pattern of the pixel definition layer.
12. The method according to claim 11 , wherein:
the packaging layer comprises an organic packaging film; and
forming the packaging layer on the light-emitting layer comprises forming an organic packaging film on the light-emitting layer by using an ink jet printing process.
13. A display panel manufactured by the method for manufacturing the display panel according to claim 11 .
14. The method according to claim 11 , wherein performing the second exposure treatment on the initial pattern comprises performing the second exposure treatment on the initial pattern by using an I-line ultraviolet light.
15. The method according to claim 14 , wherein an illumination intensity of the I-line ultraviolet light is 120 mW/cm 2 to 250 mW/cm 2 .
16. The method according to claim 11 , wherein performing the second exposure treatment on the initial pattern comprises exposing the initial pattern by using a photo-mask that exposes at least side surfaces of the initial pattern.
17. The method according to claim 11 , further comprising performing pre-drying treatment on the photolithographic material film before performing the first exposure.