Patent Application
Utility
PCT National Stage
App. No. 16/968,689
· Confirmation No. 2105
METHOD FOR POLISHING A SEMICONDUCTIOR WAFER
Inventors:
Alexander HEILMAIER, Vladimir DUTSCHKE, Leszek MISTUR, Torsten OLBRICH, Dirk MEYER, Vincent NG
Applicant:
SILTRONIC AG
On Appeal -- Awaiting Decision by the Board of Appeals
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-07-01 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2026-06-23 | WFEE.APPEAL |
Certification and Transmittal of Appeal Forwarding Fee | 2 | View | |
| 2026-06-23 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2026-06-23 | APRB |
Reply Brief Filed | 8 | View | |
| 2026-06-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-04-23 | APEA |
Examiner's Answer to Appeal Brief | 12 | View | |
| 2025-12-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 6 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 10 | View | |
| 2025-12-09 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 12 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 12 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 23 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 5 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 29 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 24 | View | |
| 2025-12-09 | APAF |
Affidavit/Declaration/ Exhibit After Notice of Appeal | 7 | View | |
| 2025-12-09 | AP.B |
Appeal Brief Filed | 45 | View | |
| 2025-12-09 | CLM |
Claims | 4 | View | |
| 2025-10-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-10-09 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-10-09 | N/AP |
Notice of Appeal Filed | 2 | View | |
| 2025-09-04 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2025-09-04 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2025-08-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-08-08 | A.NE |
Response After Final Action | 1 | View | |
| 2025-08-08 | CLM |
Claims | 4 | View | |
| 2025-08-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2025-08-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-07-16 | CTFR |
Final Rejection | 29 | View | |
| 2025-07-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2025-07-16 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2025-07-16 | SRNT |
Examiner's search strategy and results | 31 | View | |
| 2025-07-16 | FOR |
Foreign Reference | 16 | View | |
| 2025-03-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-03-20 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2025-03-20 | CLM |
Claims | 4 | View | |
| 2025-03-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2025-03-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2024-12-24 | CTNF |
Non-Final Rejection | 31 | View | |
| 2024-12-24 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2024-12-24 | SRNT |
Examiner's search strategy and results | 27 | View | |
| 2024-10-31 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2024-10-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-10-31 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-10-31 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2024-10-31 | CLM |
Claims | 3 | View | |
| 2024-10-31 | REM |
Applicant Arguments/Remarks Made in an Amendment | 22 | View | |
| 2024-09-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-09-23 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-09-23 | N/AP |
Notice of Appeal Filed | 2 | View | |
| 2024-07-31 | CTFR |
Final Rejection | 29 | View | |
| 2024-07-31 | 892 |
List of references cited by examiner | 1 | View | |
| 2024-07-31 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2024-07-31 | SRNT |
Examiner's search strategy and results | 23 | View | |
| 2024-04-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-04-02 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2024-04-02 | CLM |
Claims | 3 | View | |
| 2024-04-02 | REM |
Applicant Arguments/Remarks Made in an Amendment | 33 | View | |
| 2024-04-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2024-01-09 | CTNF |
Non-Final Rejection | 25 | View | |
| 2024-01-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2024-01-09 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2024-01-09 | SRNT |
Examiner's search strategy and results | 17 | View | |
| 2023-09-21 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | — | View | |
| 2023-09-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-09-21 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2023-09-21 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2023-09-21 | CLM |
Claims | 3 | View | |
| 2023-09-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 30 | View | |
| 2023-09-21 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2023-09-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-08-31 | CTAV |
Advisory Action (PTOL-303) | 5 | View | |
| 2023-08-31 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2023-07-19 | A.NE |
Response After Final Action | — | View | |
| 2023-07-19 | A.NE |
Response After Final Action | 1 | View | |
| 2023-07-19 | CLM |
Claims | 3 | View | |
| 2023-07-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 19 | View | |
| 2023-07-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-07-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-05-23 | CTFR |
Final Rejection | 25 | View | |
| 2023-05-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2023-05-23 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2023-05-23 | FOR |
Foreign Reference | 22 | View | |
| 2023-05-23 | SRNT |
Examiner's search strategy and results | 10 | View | |
| 2023-02-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 13 | View | |
| 2023-02-24 | CLM |
Claims | 3 | View | |
| 2023-02-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | — | View | |
| 2023-02-24 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 12 | View | |
| 2023-02-24 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 13 | View | |
| 2023-02-24 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 37 | View | |
| 2023-02-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2023-02-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-02-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-12-07 | CTNF |
Non-Final Rejection | 23 | View | |
| 2022-12-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-12-07 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2022-12-07 | FOR |
Foreign Reference | 11 | View | |
| 2022-12-07 | 1449 |
List of References cited by applicant and considered by examiner | 5 | View | |
| 2022-12-07 | BIB |
Bibliographic Data Sheet | 2 | View | |
| 2022-12-07 | FOR |
Foreign Reference | 25 | View | |
| 2022-12-07 | FOR |
Foreign Reference | 8 | View | |
| 2022-12-07 | SRNT |
Examiner's search strategy and results | 9 | View | |
| 2022-12-07 | FOR |
Foreign Reference | 28 | View | |
| 2022-03-17 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2021-12-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-12-09 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2021-12-09 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2020-11-17 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2020-11-17 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2020-11-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-11-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-11-16 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2020-11-16 | M905 |
Notice of DO/EO Missing Requirements Mailed | 2 | View | |
| 2020-11-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2020-10-23 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 8 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 11 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 16 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 19 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 4 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 62 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 24 | View | |
| 2020-10-23 | FOR |
Foreign Reference | 7 | View | |
| 2020-10-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2020-10-23 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2020-09-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2020-09-15 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2020-09-15 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2020-09-15 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2020-08-10 | P.N.101.CONV |
PCT/RO/101 - Request form for new International Application - Conventional | 5 | View | |
| 2020-08-10 | FRPR |
Certified Copy of Foreign Priority Application | 24 | View | |
| 2020-08-10 | P.PAMPHLET |
WIPO Publication - Non-English version | 23 | View | |
| 2020-08-10 | A.PE |
Preliminary Amendment | 1 | View | |
| 2020-08-10 | SPEC |
Specification | 1 | View | |
| 2020-08-10 | CLM |
Claims | 3 | View | |
| 2020-08-10 | ABST |
Abstract | 1 | View | |
| 2020-08-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2020-08-10 | ABST |
Abstract | 1 | View | |
| 2020-08-10 | PA.. |
Power of Attorney | 2 | View | |
| 2020-08-10 | ADS |
Application Data Sheet | 10 | View | |
| 2020-08-10 | SPEC |
Specification | 14 | View | |
| 2020-08-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 15 | View | |
| 2020-08-10 | OATH |
Oath or Declaration filed | 2 | View | |
| 2020-08-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-08-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2020-08-10 | SPEC |
Specification | 14 | View | |
| 2020-08-10 | CLM |
Claims | 3 | View | |
| 2020-08-10 | ABST |
Abstract | 1 | View | |
| 2020-08-10 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Alexander HEILMAIER
Haiming, GERMANY
Vladimir DUTSCHKE
Lengefeld, GERMANY
Leszek MISTUR
Burghausen, GERMANY
Torsten OLBRICH
Dresden, GERMANY
Dirk MEYER
Brand-Erbisdorf, GERMANY
Vincent NG
Singapore, SINGAPORE
Attorneys & Agents of Record
Classification
USPC
451/526
B24B37/08
B24B37/20
H10P72/0428
B24B37/005
B24B37/07
Prosecution
- Examiner
- CHANG, SUKWOO JAMES
- Art Unit
- 3723
- Customer No.
- 22045
- Docket No.
- WSAGN0163PUSA
- Confirmation No.
- 2105
Foreign Priority
102018202059.0
·
2018-02-09
·
GERMANY
Publication
- Pub. No.
- US20220080549A1
- Pub. Date
- 2022-03-17
from
SILTRONIC AG
CORRECTIVE ASSIGNMENT TO CORRECT THE DATE OF THE CHANGE OF ADDRESS FROM 03/12/2020 TO 12/03/2020 PREVIOUSLY RECORDED AT REEL: 056719 FRAME: 0881. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2021-07-01
from
DUTSCHKE, VLADIMIR,
HEILMAIER, ALEXANDER,
MEYER, DIRK,
MISTUR, LESZEK,
NG, VINCENT,
OLBRICH, TORSTEN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-08-10
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Quick Facts
- App. No.
- 16/968,689
- Filed
- 2020-11-17
- Effective Filing
- 2020-08-10
- Pub. No.
- US20220080549A1
- Examiner
- CHANG, SUKWOO JAMES
- Art Unit
- 3723
External Links