Heterojunction semiconductor device having high blocking capability
A heterojunction semiconductor device comprises a substrate; a second barrier layer is disposed on the second channel layer and a second channel is formed; a trench gate structure is disposed in the second barrier layer; the trench gate structure is embedded into the second barrier layer and is composed of a gate medium and a gate metal located in the gate medium; an isolation layer is disposed in the second channel layer and separates the second channel layer into an upper layer and a lower layer; a first barrier layer is disposed between the lower layer of the second channel layer and the first channel layer and a first channel is formed; a bottom of the metal drain is flush with a bottom of the first barrier layer; and a first metal source is disposed between the second metal source and the first channel layer.
1. A heterojunction semiconductor device having a high blocking capability, comprising: a substrate ( 1 ), wherein a first channel layer ( 2 ) is disposed on the substrate ( 1 ); a second channel layer ( 5 ), a metal drain ( 8 ) and a second metal source ( 4 b ) are arranged on the first channel layer ( 2 ); a second barrier layer ( 6 ) is disposed on the second channel layer ( 5 ) and a second channel ( 5 a ) is formed; the metal drain ( 8 ) and the second metal source ( 4 b ) are respectively located on two sides of the second channel layer ( 5 ) and the second barrier layer ( 6 ); a trench gate structure is disposed in the second barrier layer ( 6 ); the trench gate structure is embedded into the second barrier layer ( 6 ) and is composed of a gate medium ( 9 ) and a gate metal ( 10 ) located in the gate medium ( 9 ); an isolation layer ( 7 ) is disposed in the second channel layer ( 5 ) and separates the second channel layer ( 5 ) into an upper layer and a lower layer; a first barrier layer ( 3 ) is disposed between the lower layer of the second channel layer ( 5 ) and the first channel layer ( 2 ) and a first channel ( 2 a ) is formed; a bottom of the metal drain ( 8 ) is flush with a bottom of the first barrier layer ( 3 ); and a first metal source ( 4 a ) is disposed between the second metal source ( 4 b ) and the first channel layer ( 2 ).
2. The heterojunction semiconductor device having the high blocking capability according to claim 1 , wherein the first metal source ( 4 a ) is in Schottky contact with the first channel ( 2 a ), and the second metal source ( 4 b ) is in ohmic contact with the second channel ( 5 a ).
3. The heterojunction semiconductor device having the high blocking capability according to claim 1 , wherein a distance from a bottom of the isolation layer ( 7 ) to a top of the first barrier layer ( 3 ) is not less than 0.1 μm.
4. The heterojunction semiconductor device having the high blocking capability according to claim 3 , wherein a group of channel layer ( 11 ) and barrier layer ( 12 ) that are laminated to each other is at least disposed between the lower layer of the second channel layer ( 5 ) and the first barrier layer ( 3 ), and a current channel is formed between the channel layer ( 11 ) and the barrier layer ( 12 ).
5. The heterojunction semiconductor device having the high blocking capability according to claim 3 , wherein the current channel between the channel layer ( 11 ) and barrier layer ( 12 ) that are laminated to each other is in Schottky contact with the first metal source ( 4 a ).