IP Library Granted Patent US 11,508,869
Granted Patent B2
US 11,508,869 · App. 16/986,758 · Granted Nov 22, 2022

Lateral interband type II engineered (LITE) detector

Inventors: Sanjay Krishna (Plain City, OH); Sri Harsha Kodati (Columbus, OH); Theodore Ronningen (Lewis Center, OH); Seunghyun Lee (Columbus, OH)
Assignee: Ohio State Innovation Foundation
H01L31/109H01L31/1105
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Quick Facts
Patent No.
US 11,508,869
App. No.
16/986,758
Granted
Nov 22, 2022
Kind
B2
Abstract

A lateral interband Type II engineered (LITE) detector is provided. LITE detectors use engineered heterostructures to spatially separate electrons and holes into separate layers. The device may have two configurations, a positive intrinsic (PIN) configuration and a BJT (Bipolar junction transistor) configuration. The PIN configuration may have a wide bandgap (WBG) layer that transports the holes above a narrow bandgap (NBG) absorber layer that absorbs the target radiation and transports the electrons. The BJT configuration may have a WBG layer operating as a BJT above an NBG layer. In both configurations, the LITE design uses a Type II staggered offset between the NBG layers and the WBG layers that provides a built-in field for the holes to drift from an absorber region to a transporter region.

Claims (45)

1. A lateral interband semiconductor device comprising:

a substrate comprising InAs or InP defining a bottom surface of the lateral interband semiconductor device;

a narrow bandgap semiconductor (NBG) layer disposed on the substrate, the NBG layer comprising a first binary semiconductor material, a first ternary semiconductor material, or a first quaternary semiconductor material;

a wide bandgap semiconductor (WBG) layer disposed on the NBG layer, the WBG layer comprising a second binary semiconductor material, a second ternary semiconductor material, or a second quaternary semiconductor material, wherein the NBG layer and the WBG layer define a staggered offset therebetween that spatially separate electrons or holes using a built-in field;

a positive terminal defining a first upper side surface of the lateral interband semiconductor device; and

a negative terminal opposite the positive terminal, the negative terminal defining a second upper side surface of the lateral interband semiconductor device.

2. The device of claim 1 , wherein the WBG layer and the NBG layer comprise one or more of superlattice III-V semiconductors, group IV semiconductors, or group II-VI semiconductors.

3. The device of claim 1 , wherein the built-in field is caused by one or more of a Type I, Type II, or Type III band lineup between the WBG layer and the NBG layer.

4. The device of claim 1 , wherein the built-in field is caused by controlling a type and an amount of doping in the WBG layer and the NBG layer.

5. The device of claim 1 , further comprising a spacer layer between the WBG layer and the NBG layer.

6. The device of claim 1 , further comprising a plurality of additional alternating WBG layers and NBG layers.

7. The device of claim 1 , wherein the device is a photodetector.

8. The device of claim 1 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to maximize a signal-to-noise ratio without internal gain during photocurrent generation.

9. The device of claim 1 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to maximize a signal-to-noise ratio with internal gain during photocurrent generation.

10. The device of claim 1 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to include bipolar junction transistor (BJT) internal gain during photocurrent generation.

11. The device of claim 1 , wherein the WBG layer is made of an indirect material so that photon absorption takes place only in the NBG layer.

12. The device of claim 1 , wherein the WBG layer is made of a direct material so that photon absorption takes place both in the WBG layer and the NBG layer.

13. The device of claim 1 , further comprising a mask that limits where photon absorption occurs on the device.

14. The device of claim 1 , wherein the WBG and NBG layers have a layer composition, a layer thickness, and a background doping selected to optically confine one or more photons in the NBG layer.

15. The device of claim 1 , wherein the NBG layer is thinner than the WBG layer.

16. The device of claim 1 , further comprising an additional WBG layer between the NBG layer and the substrate.

17. A lateral interband semiconductor device comprising:

a substrate comprising InAs or InP defining a bottom surface of the lateral interband semiconductor device;

a narrow bandgap semiconductor (NBG) layer disposed on the substrate, the NBG layer comprising a first binary semiconductor material, a first ternary semiconductor material, or a first quaternary semiconductor material;

a wide bandgap semiconductor (WBG) layer disposed on the NBG layer, the WBG layer comprising a second binary semiconductor material, a second ternary semiconductor material, or a second quaternary semiconductor material, wherein the NBG layer, the WBG layer, define a staggered offset therebetween that spatially separate electrons or holes using a built-in and applied field;

a positive terminal defining a first upper side surface of the lateral interband semiconductor device; and

a negative terminal opposite the positive terminal, the negative terminal defining a second upper side surface of the lateral interband semiconductor device; and

an independent terminal connected to the WBG layer that is configured to generate a field that reduces spatial separation of the electrons or holes.

18. The device of claim 17 , wherein the built-in field is caused by one or more of a Type I, Type II, or Type III band lineup between the WBG layer and the NBG layer.

19. The device of claim 17 , wherein the WBG layer and the NBG layer comprise one or more of superlattice III-V semiconductors, group IV semiconductors, or group II-VI semiconductors.

20. The device of claim 17 , wherein the built-in field is caused by controlling a type and an amount of doping in the WBG layer and the NBG layer.

21. The device of claim 17 , further comprising a spacer layer between the WBG layer and the NBG layer.

22. The device of claim 17 , further comprising a plurality of additional alternating WBG layers and NBG layers.

23. The device of claim 17 , further comprising a positive terminal and a negative terminal.

24. The device of claim 17 , wherein the device is a photodetector.

25. The device of claim 17 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to maximize a signal-to-noise ratio without internal gain during photocurrent generation.

26. The device of claim 17 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to maximize a signal-to-noise ratio with internal gain during photocurrent generation.

27. The device of claim 17 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected for photovoltaic generation.

28. The device of claim 17 , wherein the NBG layer and the WBG layer have a composition, a thickness, a lateral dimension, and a doping that is selected to include bipolar junction transistor (BJT) internal gain during photocurrent generation.

29. The device of claim 17 , wherein the WBG layer is made of an indirect material so that photon absorption takes place only in the NBG layer.

30. The device of claim 17 , wherein the WBG layer is made of a direct material so that photon absorption takes place both in the WBG layer and the NBG layer.

31. The device of claim 17 , further comprising a mask that limits where photon absorption occurs on the device.

32. The device of claim 17 , wherein the WBG and NBG layers have a layer composition, a layer thickness, and a background doping selected to optically confine one or more photons in the NBG layer.

33. The device of claim 17 , wherein the NBG layer is thinner than the WBG layer.

34. The device of claim 17 , further comprising an additional WBG layer between the NBG layer and the substrate.

Assignments (2)
CONFIRMATORY LICENSE Recorded Dec 3, 2021
From: OHIO STATE UNIVERSITY
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 059423/0415 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2020
From: KRISHNA, SANJAY; KODATI, SRI HARSHA; RONNINGEN, THEODORE; LEE, SEUNGHYUN
To: OHIO STATE INNOVATION FOUNDATION
Reel/Frame 054295/0698 →
Continuity (2)
Provisional Application 62883236 · Aug 6, 2019
Related Publication 20210043791A1 · Feb 11, 2021