Multimode waveguide bends with features to reduce bending loss
Structures for a waveguide bend and methods of fabricating a structure for a waveguide bend. A waveguide core has a first section, a second section, and a waveguide bend connecting the first section with the second section. The waveguide core includes a first side surface extending about an inner radius of the waveguide bend and a second side surface extending about an outer radius of the waveguide bend. A curved strip is arranged over the waveguide bend adjacent to the first side surface or the second side surface.
1. A structure comprising:
a waveguide core including a first section, a second section, and a waveguide bend connecting the first section with the second section, the waveguide core including a first side surface and a second side surface, the first side surface extending about an inner radius of the waveguide bend, and the second side surface extending about an outer radius of the waveguide bend; and
a first curved strip arranged over the waveguide bend, the first curved strip positioned adjacent to the first side surface or the second side surface of the waveguide bend,
wherein the first curved strip comprises silicon nitride, and the waveguide bend comprises single-crystal silicon.
2. The structure of claim 1 wherein the first curved strip is positioned adjacent to the first side surface.
3. The structure of claim 2 further comprising:
a second curved strip arranged over the waveguide bend, the second curved strip positioned adjacent to the second side surface, and the second curved strip comprises silicon nitride.
4. The structure of claim 3 wherein the first curved strip and the second curved strip are contained in a plane that is displaced vertically from a plane containing the waveguide bend.
5. The structure of claim 1 wherein the first curved strip is positioned adjacent to the second side surface.
6. The structure of claim 1 wherein the first curved strip has a width that varies as a function of position along a curvature of the first curved strip.
7. The structure of claim 1 wherein the first curved strip is contained in a first plane that is displaced vertically from a second plane containing the waveguide bend.
8. The structure of claim 1 wherein the first curved strip includes a first end and a second end, and the first curved strip terminates at the first end and at the second end.
9. The structure of claim 1 wherein the first curved strip includes a first side surface defining an inner edge at an inner radius that is less than the inner radius of the waveguide bend.
10. The structure of claim 9 wherein the first curved strip includes a second side surface defining an outer edge at an outer radius that is equal to the inner radius of the waveguide bend.
11. The structure of claim 1 wherein the first curved strip includes a first side surface defining an outer edge at an outer radius that is greater than the outer radius of the waveguide bend.
12. The structure of claim 11 wherein the first curved strip includes a second side surface defining an inner edge at an inner radius equal to the outer radius of the waveguide bend.
13. The structure of claim 1 wherein the first curved strip and the waveguide bend have equal curvatures.
14. A method comprising:
patterning a first layer to form a waveguide core having a first section, a second section, and a waveguide bend that connects the first section with the second section;
forming one or more dielectric layers arranged over the waveguide core;
depositing a second layer on the one or more dielectric layers; and
patterning the second layer to form a first curved strip over the waveguide bend,
wherein the first curved strip comprises silicon nitride, the waveguide bend comprises single-crystal silicon, the first curved strip is positioned adjacent to a first side surface or a second side surface of the waveguide bend, the first side surface of the waveguide core extends about an inner radius of the waveguide bend, and the second side surface of the waveguide core extends about an outer radius of the waveguide bend.
15. The method of claim 14 wherein the first curved strip is positioned adjacent to the first side surface.
16. The method of claim 15 wherein the second layer is patterned to form a second curved strip arranged over the waveguide bend, the second curved strip is positioned adjacent to the second side surface, and the second curved strip comprises silicon nitride.
17. The method of claim 14 wherein the first curved strip is positioned adjacent to the second side surface.
18. The method of claim 14 wherein the first curved strip is formed with a width that varies as a function of position along a curvature of the first curved strip.
19. The method of claim 14 wherein the first curved strip includes a first side surface defining an inner edge at an inner radius that is less than the inner radius of the waveguide bend, and the first curved strip includes a second side surface defining an outer edge at an outer radius that is equal to the inner radius of the waveguide bend.
20. The method of claim 14 wherein the first curved strip includes a first side surface defining an outer edge at an outer radius that is greater than the outer radius of the waveguide bend, and the first curved strip includes a second side surface defining an inner edge at an inner radius equal to the outer radius of the waveguide bend.