Display apparatus with thin film encapsulation layer and method of manufacturing the same
A display apparatus includes a base substrate, a light emitting structure disposed on the base substrate, and a thin film encapsulation layer disposed on the light emitting structure and including at least one inorganic layer and at least one organic layer. The at least one inorganic layer includes a high density layer having a density of greater than or equal to about 2.0 g/cm 3 and a low density layer having a density of less than about 2.0 g/cm 3 . The high density layer and the low density layer are in contact with each other.
1. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer disposed on the light emitting structure and including:
at least one inorganic layer; and
at least one organic layer, wherein
the at least one inorganic layer includes:
a high density layer having a density of greater than or equal to about 2.0 g/cm 3 ; and
a low density layer having a density of less than about 2.0 g/cm 3 ,
the high density layer and the low density layer are in contact with each other, and
the high density layer and the low density layer each consist of a same material.
2. The display apparatus of claim 1 , wherein the high density layer is formed by performing densification on a part of the low density layer through plasma treatment.
3. The display apparatus of claim 1 , wherein the high density layer consists of silicon oxynitride.
4. The display apparatus of claim 1 , wherein the thin film encapsulation layer includes:
a first inorganic layer;
an organic layer disposed on the first inorganic layer; and
a second inorganic layer disposed on the organic layer,
wherein the first inorganic layer includes the high density layer and the low density layer.
5. The display apparatus of claim 1 , wherein the low density layer is disposed between the base substrate and the high density layer.
6. The display apparatus of claim 1 , wherein the high density layer is disposed between the low density layer and the base substrate.
7. The display apparatus of claim 1 , wherein the high density layer has a thickness in a range between about 1 nm and about 1 μm.
8. The display apparatus of claim 1 , wherein the low density layer has a refractive index of less than about 1.7.
9. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer disposed on the light emitting structure and including:
at least one inorganic layer; and
at least one organic layer, wherein
the at least one inorganic layer includes:
a lower high density layer having a density of greater than or equal to about 2.0 g/cm 3 ;
a low density layer disposed on the lower high density layer and having a density of less than about 2.0 g/cm 3 ; and
an upper high density layer disposed on the low density layer and having a density of greater than or equal to about 2.0 g/cm 3 , and
the low density layer is in contact with the lower high density layer and the upper high density layer.
10. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer disposed on the light emitting structure and including:
at least one inorganic layer; and
at least one organic layer, wherein
the at least one inorganic layer includes:
a high density layer having a density of greater than or equal to about 2.0 g/cm 3 ; and
a low density layer having a density of less than about 2.0 g/cm 3 ,
the high density layer and the low density layer are in contact with each other,
the base substrate includes:
a hole area that transmits light;
a hole peripheral area adjacent to the hole area in a non-display area;
a display area adjacent to the hole peripheral area; and
a trench disposed at the hole peripheral area, and
the at least one inorganic layer is disposed in the trench.