Semiconductor device, method for manufacturing semiconductor device, inverter circuit, drive device, vehicle, and elevator
A semiconductor device according to an embodiment includes: a silicon carbide layer; a silicon oxide layer; and a region disposed between the silicon carbide layer and the silicon oxide layer and having a nitrogen concentration equal to or more than 1×10 21 cm −3 . Nitrogen concentration distribution in the silicon carbide layer, the silicon oxide layer, and the region have a peak in the region, a nitrogen concentration at a position 1 nm away from the peak to the side of the silicon oxide layer is equal to or less than 1×10 18 cm −3 , and a carbon concentration at the position is equal to or less than 1×10 18 cm −3 .
1. A method for manufacturing a semiconductor device, comprising:
forming a silicon oxide film on a silicon carbide layer; and
performing first heat treatment in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein the silicon oxide film is formed by vapor phase growth.
2. The method according to claim 1 , wherein the first heat treatment is performed at a temperature equal to or more than 1050° C. and equal to or les than 1450° C., in an atmosphere including nitrogen oxide gas and carbon dioxide gas.
3. The method according to claim 1 , wherein the first heat treatment is performed at a temperature equal to or more than 1050° C. and equal to or les than 1450° C., in an atmosphere including oxygen gas or water vapor and carbon dioxide gas.
4. The method according to claim 1 , further comprising:
performing second heat treatment before the performing the first heat treatment at a temperature equal to or more than 1050° C. and equal to or less than 1450° C., in an atmosphere including nitrogen oxide gas;
wherein the first heat treatment is performed at a temperature equal to or more than 750° C. and less than 1050° C.
5. The method according to claim 4 , wherein the first heat treatment is performed in an atmosphere including nitrogen oxide gas and carbon dioxide gas.
6. The method according to claim 1 , wherein a partial pressure of the carbon dioxide gas in the atmosphere of the first heat treatment is equal to or more than 10%.
7. The method according to claim 1 , wherein a partial pressure of the oxidizing gas in the atmosphere of the first heat treatment is equal to or more than 10%.
8. The method according to claim 1 , further comprising: forming a gate electrode on the silicon oxide film.
9. A method for manufacturing a semiconductor device, comprising a:
forming a silicon oxide film on a silicon carbide layer; and
performing first heat treatment in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein
the silicon oxide film is formed by thermal oxidation in an atmosphere including oxygen gas and carbon dioxide go, and
the first heat treatment is performed at a temperature equal to or more than 1050° C. and equal to or less than 140° C., in an atmosphere including nitrogen oxide gas and carbon dioxide gas.
10. A method for manufacturing a semiconductor device comprising:
forming a silicon oxide film on a silicon carbide layer; and
performing first heat treatment in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein a thickness of the silicon oxide film is equal to or more than 30 nm and equal to or less than 100 nm.
11. A method for manufacturing a semiconductor device, comprising:
forming a silicon oxide film on a silicon carbide layer by thermal oxidation, in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein the thermal oxidation is performed a temperature equal to or more the 1050° C. and equal to or less than 1450° C., in an atmosphere including nitrogen oxide gas and carbon dioxide gas.
12. A method for manufacturing a semiconductor device, comprising:
forming a silicon oxide film on a silicon carbide layer by thermal oxidation, in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein a partial pressure of the carbon dioxide gas in the atmosphere is equal to or more than 10%.
13. The method according to claim 12 , wherein a thickness of the silicon oxide film is equal to or more than 30 nm and equal to or less then 100 nm.
14. The method according to claim 12 , further comprising: forming a gate electrode on the silicon oxide film.
15. A method for manufacturing a semiconductor device, comprising:
forming a silicon oxide film on a silicon carbide layer by thermal oxidation, in an atmosphere including carbon dioxide gas and at least one oxidizing gas selected from the group consisting of nitrogen oxide gas, oxygen gas, and water vapor,
wherein a partial pressure of the oxidizing gas in the atmosphere is equal to or more than 10%.