Semiconductor memory device and production method thereof
A method of producing a semiconductor memory device includes, when three directions crossing each other are set to first, second, and third directions, respectively, laminating a plurality of first laminates and a plurality of second laminates on a semiconductor substrate in the third direction. The method further includes forming ends of the plurality of first laminates in shapes of steps extending in the first direction, and forming ends of the plurality of second laminates in shapes of steps extending in both directions of the first direction and the second direction.
1. A method of producing a semiconductor memory device, comprising:
when three directions crossing each other are set to first, second, and third directions, respectively,
laminating a plurality of first laminates and a plurality of second laminates on a semiconductor substrate in the third direction;
forming ends of the plurality of first laminates in shapes of steps extending in the first direction; and
forming ends of the plurality of second laminates in shapes of steps extending in both directions of the first direction and the second direction,
wherein, during the formation of the ends of the plurality of second laminates in shapes of steps, a first resist is formed on the plurality of second laminates, anisotropic etching for the plurality of second laminates is repetitively executed after the first resist is are slimmed in the first direction by isotropic etching, a second resist is formed on the plurality of second laminates, and the anisotropic etching for the plurality of second laminates is repetitively executed after the second resist is slimmed in the second direction by the isotropic etching.
2. The method according to claim 1 , wherein the ends of the plurality of first laminates are formed in shapes of steps, before the plurality of second laminates are laminated.
3. The method according to claim 1 , wherein a plurality of third laminates are laminated on the plurality of second laminates, before the ends of the plurality of second laminates are formed in shapes of steps.
4. The method according to claim 3 , wherein ends of the plurality of third laminates are formed in shapes of steps extending in the first direction, after the ends of the plurality of second laminates are formed in shapes of steps.
5. The method according to claim 1 , wherein a plurality of third laminates are laminated on the plurality of second laminates, before the ends of the plurality of first laminates and the plurality of second laminates are formed in shapes of steps.
6. The method according to claim 5 , wherein ends of the plurality of third laminates are formed in shapes of steps extending in the first direction, before the ends of the plurality of first laminates and the plurality of second laminates are formed in shapes of steps.
7. The method according to claim 1 , wherein grooves using the first direction as a longitudinal direction and the third direction as a depth direction are formed in the plurality of first laminates.
8. The method according to claim 1 , wherein a silicon oxide film and a silicon nitride film or an amorphous silicon film are laminated alternately, when the plurality of first laminates and the plurality of second laminates are laminated.