IP Library Granted Patent US 11,252,512
Granted Patent B2
US 11,252,512 · App. 16/993,882 · Granted Feb 15, 2022

Electrostatic graphene speaker

Inventors: Qin Zhou (Fremont, CA); Alexander K. Zettl (Kensington, CA)
Assignee: The Regents of the University of California
H04R19/005H04R19/02H04R29/001B82Y15/00H04R23/002Y10S977/733
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Quick Facts
Patent No.
US 11,252,512
App. No.
16/993,882
Granted
Feb 15, 2022
Kind
B2
Abstract

This disclosure provides systems, methods, and device associated with an electrostatically driven graphene speaker. In one aspect, the device includes a graphene membrane having a diameter of about 3 millimeters to about 11 millimeters, and a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive. The device is a microphone or a loudspeaker.

Claims (79)

1. A device comprising:

a graphene membrane having a diameter of about 3 millimeters to about 11 millimeters; and

a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive;

a second electrode proximate a second side of the graphene membrane, the second electrode being electrically conductive;

wherein the device is configured to have a frequency response across a frequency range at least from 20 Hz to 20 kHz or across the entire human audible frequency range, and

wherein the device is a microphone or a loudspeaker.

2. The device of claim 1 , further comprising:

a wire in electrical contact with the graphene membrane.

3. The device of claim 2 ,

wherein the wire is a metallic wire.

4. The device of claim 1 ,

wherein the graphene membrane is about 20 nanometers to about 40 nanometers thick.

5. The device of claim 1 ,

wherein the graphene membrane includes about 1 to about 100 layers of graphene.

6. The device of claim 1 ,

wherein the graphene membrane is a multilayer graphene membrane.

7. The device of claim 1 ,

wherein the first electrode includes a silicon wafer.

8. A device comprising:

a graphene membrane;

a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive;

a second electrode proximate a second side of the graphene membrane, the second electrode being electrically conductive; and

a frame comprising a first part and a second part;

wherein the graphene membrane is suspended between the first part and the second part,

wherein the device is configured to have a frequency response across a frequency range at least from 20 Hz to 20 kHz or across the entire human audible frequency range, and

wherein the device is a microphone or a loudspeaker.

9. The device of claim 8 , further comprising:

a wire in electrical contact with the graphene membrane.

10. The device of claim 9 ,

wherein the wire is a metallic wire.

11. The device of claim 8 ,

wherein the graphene membrane includes about 1 to about 100 layers of graphene.

12. The device of claim 8 ,

wherein the graphene membrane is about 20 nanometers to about 40 nanometers thick.

13. The device of claim 8 ,

wherein the graphene membrane is a multilayer graphene membrane.

14. The device of claim 8 ,

wherein the first electrode includes a silicon wafer.

15. The device of claim 8 ,

wherein the frame comprises an open region, wherein the graphene membrane is adhered to the frame with an adhesive.

16. A device comprising:

a graphene membrane;

a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive;

a second electrode proximate a second side of the graphene membrane, the second electrode being electrically conductive; and

a frame comprising an open region;

wherein the graphene membrane is adhered to the frame with an adhesive,

wherein the device is configured to have a frequency response across a frequency range at least from 20 Hz to 20 kHz or across the entire human audible frequency range, and

wherein the device is a microphone or a loudspeaker.

17. The device of claim 16 , further comprising:

a wire in electrical contact with the graphene membrane.

18. The device of claim 17 ,

wherein the wire is a metallic wire.

19. The device of claim 16 ,

wherein the graphene membrane includes about 1 to about 100 layers of graphene.

20. The device of claim 16 ,

wherein the graphene membrane is about 20 nanometers to about 40 nanometers thick.

21. The device of claim 16 ,

wherein the graphene membrane is a multilayer graphene membrane.

22. The device of claim 16 ,

wherein the first electrode includes a silicon wafer.

23. A device comprising:

a graphene membrane;

a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive;

a second electrode proximate a second side of the graphene membrane, the second electrode being electrically conductive; and

wherein the device is configured to have a frequency response across a frequency range at least from 20 Hz to 20 kHz or across the entire human audible frequency range,

wherein the graphene membrane is configured such that air damping dominates power dissipation, and

wherein the device is a microphone or a loudspeaker.

24. The device of claim 23 , further comprising:

a wire in electrical contact with the graphene membrane.

25. The device of claim 24 ,

wherein the wire is a metallic wire.

26. The device of claim 23 ,

wherein the graphene membrane includes about 1 to about 100 layers of graphene.

27. The device of claim 23 ,

wherein the graphene membrane is about 20 nanometers to about 40 nanometers thick.

28. The device of claim 23 ,

wherein the graphene membrane is a multilayer graphene membrane.

29. The device of claim 23 ,

wherein the first electrode includes a silicon wafer.

Assignments (3)
CONFIRMATORY LICENSE Recorded Apr 23, 2021
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 056014/0680 →
CONFIRMATORY LICENSE Recorded Feb 22, 2021
From: UNIVERSITY OF CALIFORNIA
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 055353/0921 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2020
From: ZHOU, QIN; ZETTL, ALEXANDER
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 054418/0189 →
Continuity (6)
Continuation 16785089 · Feb 7, 2020
Continuation 16542847 · Aug 16, 2019
Continuation 14737903 · Jun 12, 2015
Continuation PCTUS2013075821 · Dec 17, 2013
Provisional Application 61740058 · Dec 20, 2012
Related Publication 20200374635A1 · Nov 26, 2020