Source/drain structure for semiconductor device
View Patent ↗The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over a first portion of the fin structure, and an epitaxial region formed in a second portion of the fin structure. The epitaxial region can include a first semiconductor layer and an n-type second semiconductor layer formed over the first semiconductor layer. A lattice constant of the first semiconductor layer can be greater than that of the second semiconductor layer.
1. A method, comprising:
forming a fin structure comprising a first-type nanostructure and a second-type nanostructure on a substrate;
forming an inner spacer at an end portion of the first-type nanostructure;
forming a diffusion enhancement layer on top of the inner spacer and at an end portion of the second-type nanostructure; and
forming a source/drain region in a portion of the fin structure and adjacent to the inner spacer and the diffusion enhancement layer.
2. The method of claim 1 , wherein forming the diffusion enhancement layer and forming the source/drain region comprise doping the diffusion enhancement layer and the source/drain region with an n-type dopant.
3. The method of claim 1 , wherein forming the diffusion enhancement layer comprises epitaxially growing a silicon germanium layer with a first lattice constant, and wherein forming the source/drain region comprises epitaxially growing an n-type semiconductor layer with a second lattice constant less than or equal to the first lattice constant.
4. The method of claim 1 , wherein forming the diffusion enhancement layer comprises supplying a germanium-containing gas with a first flow rate, and wherein forming the source/drain region comprises supplying the germanium-containing gas with a second flow rate lower than the first flow rate.
5. The method of claim 1 , wherein forming the source/drain region comprises:
forming a first semiconductor layer by epitaxially growing a silicon germanium layer; and
forming a second semiconductor layer by epitaxially growing a silicon layer doped with phosphorous or arsenic over the first semiconductor layer.
6. The method of claim 1 , wherein forming the diffusion enhancement layer comprises epitaxially growing the diffusion enhancement layer with a first germanium concentration, and wherein forming the source/drain region comprises epitaxially growing the source/drain region with a second germanium concentration lower than the first germanium concentration.
7. The method of claim 1 , further comprising:
removing a middle portion of the first-type nanostructure and partially etching a middle portion of the second-type nanostructure to form an opening; and
forming a gate layer in the opening, wherein the gate layer protrudes into the second-type nanostructure.
8. The method of claim 1 , further comprising forming an other diffusion enhancement layer below the inner spacer, wherein the diffusion enhancement layer and the other diffusion enhancement layer are separated by the inner spacer.
9. A method, comprising:
forming a fin structure comprising a first-type nanostructure and a second-type nanostructure over a substrate, wherein the fin structure and the second-type nanostructure have a first lattice constant;
forming a recess structure in the fin structure;
forming an inner spacer in a portion of the first-type nanostructure;
forming a diffusion enhancement layer with a second lattice constant in a portion of the second-type nanostructure and on top of the inner spacer, wherein the second lattice constant is greater than the first lattice constant; and
forming a source/drain region in the recess structure.
10. The method of claim 9 , further comprising:
removing the first-type nanostructure to form an opening;
partially etching the second-type nanostructure via the opening; and
forming a gate layer in the opening, wherein the gate layer protrudes into the partially etched second-type nanostructure.
11. The method of claim 9 , wherein forming the source/drain region comprises:
epitaxially growing a first semiconductor layer over two opposite side surfaces of the recess structure; and
epitaxially growing a second semiconductor layer over the first semiconductor layer.
12. The method of claim 9 , wherein forming the source/drain region comprises forming a first semiconductor layer and a second semiconductor layer over the first semiconductor layer, and wherein forming the first semiconductor layer comprises:
epitaxially growing a first portion of the first semiconductor layer at a bottom surface of the recess structure; and
epitaxially growing a second portion of the first semiconductor layer at a sidewall of the recess structure, wherein a thickness of the first portion is greater than a thickness of the second portion.
13. The method of claim 9 , wherein forming the diffusion enhancement layer comprises epitaxially growing a silicon germanium layer with a first germanium concentration, and wherein forming the source/drain region comprises epitaxially growing an n-type semiconductor layer with a second germanium concentration lower than the first germanium concentration.
14. The method of claim 9 , further comprising forming an other diffusion enhancement layer below the inner spacer, wherein the inner spacer is interposed between the diffusion enhancement layer and the other diffusion enhancement layer.
15. A semiconductor structure, comprising:
a fin structure with a first lattice constant over a substrate;
a gate layer and an inner spacer disposed within the fin structure;
a diffusion enhancement layer with a second lattice constant disposed within the fin structure and on top of the inner spacer, wherein the second lattice constant is greater than the first lattice constant; and
an epitaxial region disposed in a portion of the fin structure.
16. The semiconductor structure of claim 15 , wherein the epitaxial region comprises a first semiconductor layer and a second semiconductor layer disposed over the first semiconductor layer, and wherein the second semiconductor layer has a third lattice constant less than or equal to the first lattice constant.
17. The semiconductor structure of claim 15 , further comprising a gate structure and a spacer disposed over an other portion of the fin structure.
18. The semiconductor structure of claim 15 , wherein the diffusion enhancement layer comprises a silicon germanium layer with a first germanium concentration, and wherein the epitaxial region comprises an n-type semiconductor layer with a second germanium concentration lower than the first germanium concentration.
19. The semiconductor structure of claim 15 , wherein the diffusion enhancement layer comprises a germanium concentration between about 1% and about 10%, and wherein the epitaxial region is doped with an n-type dopant.
20. The semiconductor structure of claim 15 , wherein the gate layer protrudes above a bottom surface of the diffusion enhancement layer.