Atom probe tomography specimen preparation
View Patent ↗The disclosure is directed to techniques in preparing an atom probe tomography (“APT”) specimen. The disclosed techniques form an APT specimen or sample directly on a DUT region on a wafer. The APT specimen is formed integrally to the substrate or the support structure, e.g., a carrier, under the APT specimen. A laser patterning is conducted to form a trench in the DUT and one or more bump structures in the trench. The laser patterning is relatively coarse and forms a coarse surface texture on each of the bump structures. A low-kV gas ion milling using a dual-beam focused ion beam (“FIB”) microscopes is then conducted to shape the bump structures into APT specimen.
1. A method, comprising:
receiving a wafer having a semiconductor structure over a substrate;
identifying a target layer in the semiconductor structure;
forming a trench on a surface of the semiconductor structure and a sample structure in the trench through laser milling, the sample structure including a portion of the target layer;
thinning at least a tip portion of the sample structure through focused ion beam; and
forming an atom probe specimen device that includes the trench, the sample structure and a bank structure surrounding the trench.
2. The method of claim 1 , wherein forming the atom probe specimen device including separating the trench, the sample structure and the bank structure from the wafer.
3. The method of claim 1 , wherein the atom probe specimen device is integrally included on the wafer.
4. The method of claim 1 , wherein the tip portion of the sample structure is substantially at a same level or lower than an upper surface of the bank structure with respect to the substrate.
5. The method of claim 1 , wherein the sample structure includes a portion of the substrate.
6. The method of claim 1 , wherein a bottom surface of the trench extends downwardly into the substrate.
7. The method of claim 1 , wherein the forming the trench includes forming the trench using a laser milling procedure.
8. The method of claim 7 , wherein the laser milling procedure uses a pulsed laser.
9. The method of claim 1 , wherein the forming the sample structure includes forming the sample structure that includes a surface roughness ranging from about 50 nm to about 200 nm, inclusive.
10. The method of claim 1 , wherein the thinning at least the tip portion of the sample structure through focused ion beam includes thinning at least the tip portion of the sample structure through focused ion beam that includes a voltage level ranging between about 0.5 kV and about 1 kV.
11. The method of claim 1 , wherein the forming the atom probe specimen device includes forming the atom probe specimen device that includes a surface roughness smaller than about 10 nm at a tip portion of the atom probe specimen device.
12. The method of claim 11 , further comprising cleaning the sample structure after the thinning the at least the tip portion of the sample structure.
13. The method of claim 12 , wherein the cleaning includes one or more of drying etching, wet etching, and electrode polishing.
14. The method of claim 1 , wherein the thinning the at least a tip portion of the sample structure forms the sample structure that includes a cone-shape, the cone-shaped sample structure including a lower portion and the tip portion, the lower portion including a first surface roughness, and the tip portion including a second surface roughness that is different from the first surface roughness.
15. The method of claim 14 , wherein the first surface roughness is in a range from about 50 nm to about 200 nm, inclusive.
16. The method of claim 15 , wherein the second surface roughness is smaller than about 10 nm.
17. The method of claim 1 , wherein an upper surface of the bank structure is substantially at a same level or higher than a tip point of the sample structure with respect to the substrate.
18. The method of claim 14 , wherein the thinning at least a tip portion of the sample structure forms the cone-shaped sample structure that includes a needle-shaped tip portion over the lower portion of the cone-shaped sample structure.