Modification method of surface of base, composition, and polymer
A modification method of a surface of a base includes applying a composition on a surface layer of a base to form a coating film. The surface layer contains a metal atom. The coating is heated. The composition contains a polymer and a solvent. The polymer includes at an end of a main chain or at an end of a side chain thereof, a functional group that is at least one selected from: a group represented by the following formula (1); a group containing a carbon-carbon triple bond; and a group containing an aromatic hydroxy group. In the formula (1), R 1 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and n is an integer of 1 to 10, wherein in a case in which n is no less than 2, a plurality of R 1 s are identical or different.
1. A modification method of a surface of a base comprising:
applying a composition on a surface layer of a base to form a coating film, the surface layer comprising a first region which comprises a metal atom and a second region which does not comprise the metal atom included in the first region;
heating the coating film; and
removing with a rinse agent a portion of the coating film formed on the second region while keeping a portion of the coating film formed on the first region remained,
wherein the composition comprises a polymer and a solvent,
the polymer comprising:
a main chain comprising at least one structural unit selected from the group consisting of: a structural unit derived from substituted or unsubstituted styrene; a structural unit derived from (meth)acrylic acid or a (meth)acrylic acid ester; and a structural unit derived from substituted or unsubstituted ethylene; and
a functional group attached to at least one end of the main chain, the functional group being at least one selected from the group consisting of: a group represented by a formula (1); a group comprising a carbon-carbon triple bond; and a group comprising an aromatic hydroxy group:
wherein, in the formula (1), R 1 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and n is an integer of 1 to 10, wherein in a case in which n is no less than 2, a plurality of R 1 s are identical or different.
2. The modification method according to claim 1 , wherein the second region substantially consists of at least one nonmetal atom.
3. The modification method according to claim 1 , further comprising bringing alcohol, dilute acid, an aqueous hydrogen peroxide solution, ozone or plasma into contact with a surface of the base after the removing.
4. The modification method according to claim 1 , further comprising depositing a pattern, by a CVD process or an ALD process, on a surface of the base after the removing.
5. The modification method according to claim 1 , further comprising eliminating by etching, the polymer on the surface of the base after the removing.
6. The modification method according to claim 1 , wherein the metal atom constitutes a metal simple substance, an alloy, an electrically conductive nitride, or a silicide.
7. The modification method according to claim 1 , wherein the metal atom is a copper atom, an iron atom, a zinc atom, a cobalt atom, an aluminum atom, a titanium atom, a tin atom, a tungsten atom, a zirconium atom, a tantalum atom, a germanium atom, a molybdenum atom, a ruthenium atom, a gold atom, a silver atom, a platinum atom, a palladium atom, or a nickel atom.
8. The modification method according to claim 1 , wherein a polystyrene-equivalent number average molecular weight of the polymer is no less than 500 and no greater than 50,000.
9. The modification method according to claim 1 , wherein the metal atom constitutes a copper simple substance, a cobalt simple substance, a tungsten simple substance, a tantalum simple substance, or tantalum nitride.
10. The modification method according to claim 1 , wherein the second region comprises a nonmetal atom which constitutes a nonmetal simple substance, a nonmetal oxide, a nonmetal nitride, or a nonmetal oxidenitride.
11. The modification method according to claim 10 , wherein the nonmetal atom constitutes a silicon oxide.
12. The modification method according to claim 1 , wherein the functional group is at least one selected from the group consisting of: a group represented by the formula (1); and a group comprising a carbon-carbon triple bond.
13. The modification method according to claim 1 , wherein the functional group is a group comprising a carbon-carbon triple bond.
14. The modification method according to claim 1 , wherein the main chain is a block copolymer which comprises the at least one structural unit.
15. The modification method according to claim 1 , wherein the main chain is a diblock copolymer which comprises the at least one structural unit.
16. The modification method according to claim 1 , wherein a polystyrene-equivalent number average molecular weight of the polymer is no less than 2,000 and no greater than 30,000.
17. The modification method according to claim 1 , wherein a polystyrene-equivalent number average molecular weight of the polymer is no less than 4,000 and no greater than 15,000.
18. The modification method according to claim 1 , wherein a polystyrene-equivalent number average molecular weight of the polymer is no less than 5,000 and no greater than 8,000.