Multi-zone heater
A multi-zone heater includes an outer circumferential zone heater and first and second elemental wire portions. The outer circumferential zone heater is a coil that is provided in an outer circumferential zone of a ceramic substrate in the same plane as a plane in which a central zone heater is provided and that is routed throughout the outer circumferential zone in a unicursal manner from one end portion to the other end portion in the outer circumferential portion. The first elemental wire portion extends from a first terminal, passes through a central portion, is connected to the one end portion of the outer circumferential zone heater, and has a meandering shape in plan view. The second elemental wire portion extends from a second terminal, passes through the central portion, is connected to the other end portion of the outer circumferential zone heater, and has a meandering shape in plan view.
1. A multi-zone heater, comprising:
a disc-shaped ceramic substrate that has a wafer placement surface;
a coil-shaped or mesh-shaped central zone heater provided in a central portion of the ceramic substrate;
at least one coil-shaped or mesh-shaped outer circumferential zone heater that is provided so as to correspond to at least one outer circumferential zone in an outer circumferential portion of the ceramic substrate in a same plane as a plane in which the central zone heater is disposed and that is routed throughout the at least one outer circumferential zone in a unicursal manner from one end portion to the other end portion in the at least one outer circumferential zone;
a first elemental wire portion that extends from a first terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the one end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions; and
a second elemental wire portion that extends from a second terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the other end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions,
wherein the first elemental wire portion and the second elemental wire portion are parallel to each other, and
a heat generation amount in a section with a small radius of curvature in curved portions of the first and the second elemental wire portions is greater than a heat generation amount in a section with a large radius of curvature in curved portions of the first and the second elemental wire portions.
2. The multi-zone heater according to claim 1 ,
wherein the at least one outer circumferential zone includes a plurality of outer circumferential zones in the outer circumferential portion of the ceramic substrate.
3. The multi-zone heater according to claim 1 ,
wherein resistance per unit length of the first elemental wire portion and the second elemental wire portion is smaller than resistance per unit length of the at least one outer circumferential zone heater.
4. The multi-zone heater according to claim 1 ,
wherein the curved portions of the first elemental wire portion and the second elemental wire portion have radii of curvature greater than or equal to 5 mm.
5. The multi-zone heater according to claim 1 ,
wherein the curved portions of the first and the second elemental wire portions have different radii or curvature respectively.
6. A multi-zone heater, comprising:
a disc-shaped ceramic substrate that has a wafer placement surface;
a coil-shaped or mesh-shaped central zone heater provided in a central portion of the ceramic substrate;
at least one coil-shaped or mesh-shaped outer circumferential zone heater that is provided so as to correspond to at least one outer circumferential zone in an outer circumferential portion of the ceramic substrate in a same plane as a plane in which the central zone heater is disposed and that is routed throughout the at least one outer circumferential zone in a unicursal manner from one end portion to the other end portion in the at least one outer circumferential zone;
a first elemental wire portion that extends from a first terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the one end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions; and
a second elemental wire portion that extends from a second terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the other end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions,
wherein the first elemental wire portion and the second elemental wire portion have respective parts where the first elemental wire portion and the second elemental wire portion are close to each other, and the first elemental wire portion and the second elemental wire portion have respective parts where the first elemental wire portion and the second elemental wire portion are spaced from each other,
a distance between the first elemental wire portion and the second elemental wire portion in the part where the first elemental wire portion and the second elemental wire portion are close to each other is smaller than a distance between the first elemental wire portion and the second elemental wire portion in the part where the first elemental wire portion and the second elemental wire portion are spaced from each other, and
a heat generation amount in the part where the first elemental wire portion and the second elemental wire portion are close to each other is greater than a heat generation amount in the part where the first elemental wire portion and the second elemental wire portion are spaced from each other.
7. The multi-zone heater according to claim 6 ,
wherein the at least one outer circumferential zone includes a plurality of outer circumferential zones in the outer circumferential portion of the ceramic substrate.
8. The multi-zone heater according to claim 6 ,
wherein resistance per unit length of the first elemental wire portion and the second elemental wire portion is smaller than resistance per unit length of the at least one outer circumferential zone heater.