Optical inspection apparatus
According to one embodiment, an optical inspection apparatus includes a first illuminator, an image-forming optical system, a scattering light selector, and an imaging element. The first illuminator is configured to emit a first light beam. The first light beam reflected by an object is incident on the image-forming optical system. The scattering light selector is configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam. The passing light beams simultaneously form an image on the imaging element.
1. An optical inspection apparatus comprising:
a first illuminator configured to emit a first light beam;
a second illuminator located at a position different from a position of the first illuminator, the second illuminator being configured to emit a second light beam simultaneously with the first light beam;
an image-forming optical system on which the first light beam reflected by an object is incident;
a scattering light selector configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam; and
an imaging element on which the passing light beams simultaneously form an image;
wherein:
the first light beam and the second light beam are reflected by the object and made incident on the image-forming optical system,
the scattering light selector is configured to emit the first light beam, which has passed through the image-forming optical system, as a third light beam which is one of the passing light beams, and configured to emit the second light beam, which has passed through the image-forming optical system, as a fourth light beam which is the other of the passing light beams, the fourth light beam having a wavelength region different from a wavelength region of the third light beam, and
the third light beam and the fourth light beam, which emanate from the scattering light selector, form an image on the imaging element.
2. The optical inspection apparatus according to claim 1 , wherein a first reflection angle of the first light beam on the object is less than a second reflection angle of the second light beam on the object.
3. The optical inspection apparatus according to claim 1 , wherein a wavelength region of the first light beam, which the first illuminator emits, is different from a wavelength region of the second light beam which the second illuminator emits.
4. The optical inspection apparatus according to claim 3 , comprising transmission filters which are configured to transmit light beams of different wavelength regions provided on an optical path of the first light beam which the first illuminator emits, and on an optical path of the second light beam which the second illuminator emits.
5. The optical inspection apparatus according to claim 1 , wherein the first light beam, which the first illuminator emits, and the second light beam, which the second illuminator emits, are collimated beams.
6. The optical inspection apparatus according to claim 1 , wherein one of the first light beam and the second light beam is coaxial reflected illumination.
7. The optical inspection apparatus according to claim 1 , wherein
the scattering light selector includes a first region and a second region, and
the first region and the second region have different wavelength regions of light beams which are transmitted toward the imaging element.
8. The optical inspection apparatus according to claim 7 , wherein the first region and the second region of the scattering light selector are in rotation symmetry.
9. The optical inspection apparatus according to claim 1 , wherein the image-forming optical system and the scattering light selector form a telecentric optical system for at least one of the light beams.