Acoustic wave device
An acoustic wave device includes a piezoelectric substrate in which a reverse-velocity surface is convex and an IDT electrode on the piezoelectric substrate. When an acoustic wave propagation direction is a first direction and a direction perpendicular or substantially perpendicular to the first direction is a second direction, the portion of the IDT electrode where first and second electrode fingers overlap in the first direction is a crossing region. The crossing region includes a center region centrally located in the second direction and a first and second edge regions located on two sides of the center region. Recesses 17 and 18 are respectively provided in portions of the piezoelectric substrate located in the first and second edge regions between the portions where the first and second electrode fingers are provided.
1. An acoustic wave device comprising:
a piezoelectric substrate including a reverse-velocity surface that is convex; and
an interdigital transducer (IDT) electrode provided on the piezoelectric substrate; wherein
the IDT electrode includes a first busbar and a second busbar that face each other, a plurality of first electrode fingers having first ends that are connected to the first busbar, and a plurality of second electrode fingers having first ends that are connected to the second busbar and that are interdigitated with the plurality of first electrode fingers;
when an acoustic wave propagation direction is a first direction and a direction perpendicular or substantially perpendicular to the first direction is a second direction, a portion of the IDT electrode where the plurality of first electrode fingers and the plurality of second electrode fingers overlap in the first direction is a crossing region;
the crossing region includes of a center region that is centrally located in the second direction, a first edge region that is located at a side of the center region adjacent to or in a vicinity of the first busbar, and a second edge region that is located at a side of the center region adjacent to or in a vicinity of the second busbar;
the IDT electrode includes a first gap region located between the first edge region and the first busbar and a second gap region located between the second edge region and the second busbar; and
recesses are respectively provided in portions of the piezoelectric substrate located in the first edge region and the second edge region between portions where the plurality of first electrode fingers are provided and portions where the plurality of second electrode fingers are provided.
2. The acoustic wave device according to claim 1 , wherein
an acoustic velocity in the first edge region and the second edge region is lower than an acoustic velocity in the center region;
an acoustic velocity in the first gap region is higher than an acoustic velocity in the first edge region; and
an acoustic velocity in the second gap region is higher than an acoustic velocity in the second edge region.
3. The acoustic wave device according to claim 1 , wherein
the recesses provided in the piezoelectric substrate in the first edge region extend through portions of the first gap region located between the portions of the piezoelectric substrate where the plurality of first electrode fingers are provided; and
the recesses provided in the piezoelectric substrate in the second edge region extend through portions of the second gap region located between the portions of the piezoelectric substrate where the plurality of second electrode fingers are provided.
4. The acoustic wave device according to claim 1 , wherein
the first busbar and the second busbar each include a plurality of openings; and
the plurality of openings are located along the first direction in the first busbar and the second busbar.
5. The acoustic wave device according to claim 4 , wherein the piezoelectric substrate is made of lithium niobate.
6. The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a first busbar region in which the first busbar is located and a second busbar region in which the second busbar is located; and
acoustic-velocity-increasing layers, which increase an acoustic velocity in the first busbar region and the second busbar region, are provided on the first busbar and the second busbar.
7. The acoustic wave device according to claim 6 , wherein the acoustic-velocity-increasing layers are made of alumina, aluminum nitride, or silicon nitride.
8. The acoustic wave device according to claim 6 , wherein an acoustic velocity in the first busbar region and the second busbar region is higher than an acoustic velocity in the center region.
9. The acoustic wave device according to claim 1 , wherein
the piezoelectric substrate includes a high-acoustic-velocity layer and a piezoelectric layer that is directly or indirectly provided on the high-acoustic-velocity layer;
an acoustic velocity of bulk waves propagating along the high-acoustic-velocity layer is higher than an acoustic velocity of acoustic waves propagating along the piezoelectric layer; and
the piezoelectric layer is made of lithium tantalate.
10. The acoustic wave device according to claim 9 , wherein
a low-acoustic-velocity film is provided between the high-acoustic-velocity layer and the piezoelectric layer; and
an acoustic velocity of bulk waves propagating along the low-acoustic-velocity film is lower than an acoustic velocity of bulk waves propagating along the piezoelectric layer.
11. The acoustic wave device according to claim 10 , wherein the recesses do not extend to the low-acoustic-velocity film.
12. The acoustic wave device according to claim 9 , wherein the high-acoustic-velocity layer is a support substrate.
13. The acoustic wave device according to claim 9 , further comprising:
a support substrate; wherein
the high-acoustic-velocity layer is a high-acoustic-velocity film provided between the support substrate and the piezoelectric layer.
14. The acoustic wave device according to claim 1 , wherein the piezoelectric substrate is made of lithium tantalate.
15. The acoustic wave device according to claim 1 , further comprising:
a first reflector; and
a second reflector; wherein
in the first direction, the IDT electrode is provided between the first reflector and the second reflector.
16. The acoustic wave device according to claim 1 , wherein a protective film including a dielectric material is provided on the piezoelectric substrate to cover the IDT electrode.
17. The acoustic wave device according to claim 1 , wherein
only the plurality of first electrode fingers are provided in the first gap region; and
only the plurality of second electrode fingers are provided in the second gap region.
18. The acoustic wave device according to claim 1 , wherein a depth of each of the recesses is less than about 100 nm.
19. The acoustic wave device according to claim 1 , wherein the reverse-velocity surface is elliptical or substantially elliptical.