Vapor phase deposition of organic films
Methods and apparatus for vapor deposition of an organic film are configured to vaporize an organic reactant at a first temperature, transport the vapor to a reaction chamber housing a substrate, and maintain the substrate at a lower temperature than the vaporization temperature. Alternating contact of the substrate with the organic reactant and a second reactant in a sequential deposition sequence can result in bottom-up filling of voids and trenches with organic film in a manner otherwise difficult to achieve. Deposition reactors conducive to depositing organic films are provided.
1. A method of forming an organic film, the method comprising:
vaporizing a first reactant at a vaporizing temperature in a vaporizer to form a first reactant vapor;
exposing a substrate in a reaction space to the first reactant vapor and a second reactant vapor, wherein the substrate is maintained at a temperature below about 130° C. during the exposing, wherein the temperature is between about 5° C. and about 50° C. below the vaporizing temperature during the exposing; and
depositing a polyamic acid film from the first reactant vapor and the second reactant vapor on the substrate, wherein the polyamic acid film is mostly polyamic acid.
2. The method of claim 1 , further comprising converting the polyamic acid film to a polyimide.
3. The method of claim 1 , wherein the substrate is a semiconductor substrate.
4. The method of claim 1 , wherein the first reactant comprises a dianhydride.
5. The method of claim 4 , wherein the second reactant comprises a diamine.
6. The method of claim 1 , wherein the dianhydride comprises pyromellitic dianhydride (PMDA).
7. The method of claim 6 , wherein the second reactant comprises 1,6-diaminohexane (DAH).
8. The method of claim 1 , wherein the exposing the substrate to the first reactant vapor and the second reactant vapor comprises alternately and sequentially exposing the substrate to the first reactant vapor and the second reactant vapor.
9. The method of claim 1 , wherein the second reactant comprises a diamine.
10. The method of claim 9 , wherein the diamine comprises 1,6-diaminohexane (DAH).
11. The method of claim 1 , wherein the vaporizing is conducted at a higher temperature than the temperature at which the substrate is maintained during the exposing.
12. A method of forming an organic film, the method comprising:
vaporizing a first reactant in a vaporizer to form a first reactant vapor;
exposing a substrate in a reaction space to the first reactant vapor and a second reactant vapor, wherein the substrate is maintained at a temperature between about 100° C. and about 150° C. during the exposing; and
depositing a polyamic acid film from the first reactant vapor and the second reactant vapor on the substrate, wherein the substrate comprises a topography with a three-dimensional structure, and wherein the depositing comprises preferentially depositing the polyamic acid film over lower features of the topography compared to higher features of the topography such that the polyamic acid film reduces an aspect ratio of the three-dimensional structure on the substrate as the polyamic acid film deposits.
13. The method of claim 12 , wherein the polyamic acid film is mostly polyamic acid.
14. The method of claim 12 , wherein the substrate is maintained below about 130° C. during the exposing.
15. An apparatus for film deposition, the apparatus comprising:
a vessel configured for vaporizing a first reactant at a vaporizing temperature to form a first reactant vapor;
a reaction space configured to accommodate a substrate; and
a control system configured to cause the apparatus to perform a process, the process comprising:
exposing the substrate in the reaction space to the first reactant vapor and a second reactant vapor, wherein the substrate is maintained at a temperature below about 130° C. during the exposing, wherein the temperature is between about 5° C. and about 50° C. below the vaporizing temperature during the exposing; and
depositing a polyamic acid film from the first reactant vapor and the second reactant vapor on the substrate, wherein the polyamic acid film is mostly polyamic acid.
16. The apparatus of claim 15 , wherein the control system is further configured to convert the polyamic acid film to a polyimide after depositing the polyamic acid film.
17. The apparatus of claim 15 , wherein the control system is configured to expose the substrate to the first reactant vapor and the second reactant vapor by alternately and sequentially exposing the substrate to the first reactant vapor and the second reactant vapor.
18. The apparatus of claim 15 , wherein the control system is further configured to maintain the temperature of the substrate during the exposing lower than a temperature for vaporizing the first reactant to form the first reactant vapor.
19. The apparatus of claim 15 , wherein the first reactant comprises a dianhydride, and the second reactant comprises a diamine.