MEMS actuator system
A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.
1. A multi-axis MEMS assembly configured to provide multi-axis movement, the multi-axis MEMS assembly comprising:
a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and
a second in-plane MEMS actuator configured to enable movement along at least a Y-axis;
wherein the first in-plane MEMS actuator is interconnected with the second in-plane MEMS actuator in a Z-axis by coupling moveable portions and fixed portions contained within the first in-plane MEMS actuator and the second in-plane MEMS actuator.
2. The multi-axis MEMS assembly of claim 1 wherein the first in-plane MEMS actuator is also configured to enable movement along the Y-axis.
3. The multi-axis MEMS assembly of claim 1 wherein the second in-plane MEMS actuator is also configured to enable movement along the X-axis.
4. The multi-axis MEMS assembly of claim 1 wherein the first in-plane MEMS actuator and the second in-plane MEMS actuator form a stacked multi-axis micro-electrical-mechanical system (MEMS) actuator.
5. The multi-axis MEMS assembly of claim 4 wherein one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is positioned on top of the other of the first in-plane MEMS actuator and the second in-plane MEMS actuator.
6. The multi-axis MEMS assembly of claim 1 wherein the first in-plane MEMS actuator and the second in-plane MEMS actuator form a cascaded multi-axis micro-electrical-mechanical system (MEMS) actuator.
7. The multi-axis MEMS assembly of claim 6 wherein one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is positioned next to the other of the first in-plane MEMS actuator and the second in-plane MEMS actuator.
8. The multi-axis MEMS assembly of claim 1 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is an electrostatic MEMS actuator.
9. The multi-axis MEMS assembly of claim 1 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is an electromagnetic MEMS actuator.
10. The multi-axis MEMS assembly of claim 1 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is a piezoelectric MEMS actuator.
11. The multi-axis MEMS assembly of claim 1 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is an image stabilization actuator.
12. The multi-axis MEMS assembly of claim 1 further comprising:
an optoelectronic device coupled to one of the first in-plane MEMS actuator and the second in-plane MEMS actuator.
13. A multi-axis MEMS assembly configured to provide multi-axis movement, the multi-axis MEMS assembly comprising:
a first in-plane MEMS actuator configured to enable movement along at least an X-axis;
a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; and
an optoelectronic device coupled to one of the first in-plane MEMS actuator and the second in-plane MEMS actuator;
wherein the first in-plane MEMS actuator is interconnected with the second in-plane MEMS actuator in a Z-axis by coupling moveable portions and fixed portions contained within the first in-plane MEMS actuator and the second in-plane MEMS actuator; and
wherein the first in-plane MEMS actuator and the second in-plane MEMS actuator form a stacked multi-axis micro-electrical-mechanical system (MEMS) actuator.
14. The multi-axis MEMS assembly of claim 13 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is an electrostatic MEMS actuator.
15. The multi-axis MEMS assembly of claim 13 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is an electromagnetic MEMS actuator.
16. The multi-axis MEMS assembly of claim 13 wherein at least one of the first in-plane MEMS actuator and the second in-plane MEMS actuator is a piezoelectric MEMS actuator.