Mass transfer method and device for micro light emitting diode chips

1. A mass transfer method for micro light emitting diode chips, comprising the following steps:

bonding micro light emitting diode chips prepared on a sapphire substrate to a transfer substrate;

peeling off the sapphire substrate;

performing magnetic pole electroplating on the micro light emitting diode chips obtained by peeling off the sapphire substrate to enable corresponding magnetic poles to be generated at corresponding positions of the micro light emitting diode chips;

peeling off the transfer substrate;

placing the micro light emitting diode chips obtained by peeling off the transfer substrate in a dispersion liquid to form a solution comprising the micro light emitting diode chips dispersed in the dispersion liquid, wherein a respective one of the micro light emitting diode chips dispersed dispersion liquid comprises a respective one of the magnetic poles;

forming soldering areas for accommodating the micro light emitting diode chips dispersed in the dispersion liquid on a display substrate; and

placing the micro light emitting diode chips, which are dispersed in the dispersion liquid, in the soldering areas under an action of a magnetic field force;

wherein the performing magnetic pole electroplating on the micro light emitting diode chips obtained by peeling off the sapphire substrate to enable the corresponding magnetic poles to be generated at the corresponding positions of the micro light emitting diode chips comprises:

patterning a photoresist on a side, where the micro light emitting diode chips are attached, of the transfer substrate obtained by peeling off the sapphire substrate to form a first photoresist patterned;

depositing conductive layers in the area defined by the first photoresist to form electrodes for electroplating; and

placing the micro light emitting diode chips deposited the conductive layers in an electrolyte, and generating corresponding patterned magnetic poles at corresponding positions of the conductive layers depositing on the micro light emitting diode chips.

2. The method according to claim 1 , wherein before placing the micro light emitting diode chips obtained by peeling off the transfer substrate in the dispersion liquid, the method further comprises:

removing the first photoresist;

applying a second photoresist on surfaces of the patterned magnetic poles by spin coating; and

after peeling off the transfer substrate, removing the second photoresist.

3. The method according to claim 1 , wherein the forming soldering areas for accommodating the micro light emitting diode chips dispersed in the dispersion liquid on the display substrate comprises:

disposing the soldering areas formed by a patternable viscous adhesive for accommodating the dispersed micro light emitting diode chips according to a preset interval on a base substrate of the display substrate.

4. The method according to claim 3 , wherein after forming the soldering areas for accommodating the dispersed micro light emitting diode chips dispersed in the dispersion liquid on the display substrate, the method further comprises:

forming a magnetic field shielding layer on the display substrate, wherein the magnetic field shielding layer comprises spaced openings for accommodating the soldering areas.

5. The method according to claim 4 , the forming soldering areas for accommodating the micro light emitting diode chips dispersed in the dispersion liquid on a display substrate comprises:

forming the soldering areas patterned in the openings.

6. The method according to claim 4 , further comprises:

forming a surface energy control layer at corresponding position of the magnetic field shielding layer.

7. The method according to claim 6 , wherein after forming the solution comprising the micro light emitting diode chips dispersed, the method further comprises:

under hydrophobicity of the surface energy control layer, hydrophilicity of the soldering areas, and magnetic field shielding of the magnetic field shielding layer, controlling the micro light emitting diode chips dispersed to move toward the soldering areas by the magnetic field force.

8. The method according to claim 7 , wherein after placing the micro light emitting diode chips, which are dispersed in the dispersion liquid, in the soldering areas, the method further comprises:

curing the patternable viscous adhesive by a thermocuring process; and

fixing the micro light emitting diode chips dispersed.

9. The method according to claim 1 , wherein the dispersion liquid comprises one or more of a silane coupling agent, methacryloyloxy silicon or methanol.

10. The method according to claim 1 , wherein a pH value of the electrolyte is 3 to 4, a current density is 8 mA/cm 2 , and an electroplating current duty cycle is 66.6%.

11. A mass transfer device, configured to transfer micro light emitting diode chips dispersed peeling off from a transfer substrate to a display substrate according to the mass transfer method of the micro light emitting diode chips according to claim 1 , wherein:

the transfer substrate is configured to bond the micro light emitting diode chips prepared on a sapphire substrate.

12. The mass transfer device according to claim 11 , further comprising:

a cavity containing a dispersion fluidized bed.

13. The mass transfer device according to claim 12 , wherein:

the dispersion fluidized bed is methanol fluidized bed.

14. The mass transfer device according to claim 12 , wherein:

a concentration of a dispersion liquid is 5 wt %-30 wt %.

15. The mass transfer device according to claim 11 , wherein:

the display substrate is configured to pick up the micro light emitting diode chips dispersed under the action of the magnetic field force.

16. A display panel, comprising:

a display substrate;

a magnetic field shielding layer formed on the display substrate, wherein the magnetic field shielding layer comprises spaced openings;

soldering areas formed in the openings, wherein the soldering areas are formed of a patternable viscous adhesive;

a micro light emitting diode chip formed on each of the soldering areas;

a magnetic pole formed on a side of the micro light emitting diode chip away from the display substrate; and

a surface energy control layer, which is hydrophobic, formed on a corresponding position of the magnetic field shielding layer.

17. The display substrate according to claim 16 , wherein:

surfaces of the soldering areas are hydrophilic.

18. The display panel according to claim 16 , further comprising:

a conductive layer between the micro light emitting diode chip and the magnetic pole.