IP Library Granted Patent US 11,437,552
Granted Patent B2
US 11,437,552 · App. 17/026,752 · Granted Sep 6, 2022

Semiconductor device with transmissive layer and manufacturing method thereof

Inventors: David Clark (Ipswich, GB); Curtis Zwenger (Chandler, AZ)
Assignee: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.
H01L33/58H01L21/563H01L21/6835H01L24/00H01L33/44H01L24/16H01L24/32H01L24/73H01L24/92H01L33/62H01L2221/68345H01L2224/13101H01L2224/16225H01L2224/73204H01L2224/73253H01L2224/81005H01L2224/81203H01L2224/81224H01L2224/81815H01L2224/92125H01L2924/00014H01L2924/15311H01L2924/18161H01L2924/3511
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Quick Facts
Patent No.
US 11,437,552
App. No.
17/026,752
Granted
Sep 6, 2022
Kind
B2
Abstract

A method for manufacturing a semiconductor device and a semiconductor device produced thereby. For example and without limitation, various aspects of this disclosure provide a method for manufacturing a semiconductor device, and a semiconductor device produced thereby, that that comprises a transparent, translucent, non-opaque, or otherwise optically-transmissive, external surface.

Claims (54)

1. A semiconductor device, comprising:

a transmissive layer comprising a transmissive layer top side and a transmissive layer bottom side, wherein the transmissive layer comprises a window region that permits passage of radiation between the transmissive layer top side and the transmissive layer bottom side;

a lower redistribution structure comprising a redistribution structure top side, and a redistribution structure bottom side, wherein the redistribution structure top side comprises first conductive pads, and the redistribution structure bottom side contacts the transmissive layer top side; and

a first component comprising a component top side, a component bottom side, and a first radiation circuit, wherein the component bottom side is coupled to the first conductive pads of the redistribution structure top side;

wherein the first radiation circuit is vertically aligned with the window region for the radiation.

2. The semiconductor device of claim 1 , further comprising an underfill material between the component bottom side and the redistribution structure top side.

3. The semiconductor device of claim 2 , wherein the underfill material extends between the first radiation circuit and the window region.

4. The semiconductor device of claim 1 , further comprising:

an upper redistribution structure over the component top side; and

conductive interconnection structures that couple the upper redistribution structure to the lower redistribution structure.

5. The semiconductor device of claim 1 , wherein:

the first radiation circuit comprises a sensor radiation circuit configured to receive the radiation.

6. The semiconductor device of claim 1 , wherein:

the first radiation circuit comprises a transmitter radiation circuit configured to transmit the radiation.

7. The semiconductor device of claim 1 , further comprising:

a second component coupled to second conductive pads of the redistribution structure top side;

wherein the second component comprises a second radiation circuit;

wherein the first radiation circuit comprises one of a sensor radiation circuit or a transmitter radiation circuit; and

wherein the second radiation circuit comprises another one of the sensor radiation circuit or the transmitter radiation circuit.

8. A semiconductor device, comprising:

a lower redistribution structure comprising one or more conductive layers;

a first component comprising one or more optical devices;

a second component operatively coupled to the one or more conductive layers of the lower redistribution structure;

a transmissive layer along an external surface of the semiconductor device and configured to permit passage of radiation;

an upper redistribution structure comprising one or more conductive layers; and

conductive vias about a periphery of at least the second component, wherein the conductive vias couple the one or more conductive layers of the lower redistribution structure with the one or more conductive layers of the upper redistribution structure;

wherein the one or more optical devices of the first component are vertically aligned with the transmissive layer for the radiation.

9. The semiconductor device of claim 8 , wherein the second component includes a controller.

10. The semiconductor device of claim 8 , wherein:

the second component is laterally adjacent the first component; and

a transmitter of the second component is positioned to transmit radiation through the transmissive layer and out the external surface of the semiconductor device.

11. The semiconductor device of claim 10 , wherein the transmissive layer comprises one or more lenses configured to direct radiation from the transmitter.

12. The semiconductor device of claim 8 , wherein:

the transmissive layer comprises a top side, a bottom side, and a sidewall between the top side and the bottom side; and

the sidewall of the transmissive layer provides at least part of a sidewall surface of the semiconductor device.

13. The semiconductor device of claim 8 , further comprising an encapsulant between the upper redistribution structure and the lower redistribution structure.

14. The semiconductor device of claim 13 , wherein:

the first component comprises a component top side, a component bottom side, and a component sidewall adjoining the component top side and the component bottom side; and

the encapsulant contacts the component sidewall.

15. A method of manufacturing a semiconductor device, the method comprising:

providing a lower redistribution structure comprising a redistribution structure top side, and a redistribution structure bottom side, wherein the redistribution structure top side comprises first conductive pads;

coupling a component bottom side of a first component to the first conductive pads of the redistribution structure top side, wherein the first component comprises a component top side, the component bottom side a first radiation circuit; and

providing a transmissive layer comprising a transmissive layer top side and a transmissive layer bottom side, wherein the transmissive layer top side contacts the redistribution structure bottom side, wherein the transmissive layer comprises a window region that permits passage of radiation between the transmissive layer top side and the transmissive layer bottom side, wherein the first radiation circuit is vertically aligned with the window region for the radiation.

16. The method of claim 15 , comprising underfilling with an underfill material between the component bottom side and the redistribution structure top side.

17. The method of claim 16 , wherein the underfilling extends the underfill material between the first radiation circuit and the window region.

18. The method of claim 15 , comprising:

providing an upper redistribution structure over the component top side; and

coupling, with conductive interconnection structures, the upper redistribution structure to the lower redistribution structure.

19. The method of claim 15 , wherein the first radiation circuit comprises a sensor radiation circuit configured to receive the radiation.

20. The method of claim 15 , comprising:

coupling a second component to second conductive pads of the redistribution structure top side,

wherein the second component comprises a second radiation circuit;

wherein the first radiation circuit comprises one of a sensor radiation circuit or a transmitter radiation circuit; and

wherein the second radiation circuit comprises another one of the sensor radiation circuit or the transmitter radiation circuit.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 24, 2020
From: AMKOR TECHNOLOGY, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.
Reel/Frame 054514/0218 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 15, 2020
From: CLARK, DAVID; ZWENGER, CURTIS
To: AMKOR TECHNOLOGY, INC.
Reel/Frame 054060/0492 →