Charged particle beam apparatus
To accomplish fast automated micro-sampling, provided is a charged particle beam apparatus, which is configured to automatically fabricate a sample piece from a sample, the charged particle beam apparatus including: a charged particle beam irradiation optical system configured to radiate a charged particle beam; a sample stage configured to move the sample that is placed on the sample stage; a sample piece transportation unit configured to hold and convey the sample piece separated and extracted from the sample; a holder fixing base configured to hold a sample piece holder to which the sample piece is transported; and a computer configured to perform position control with respect to a second target, based on a machine learning model in which first information including a first image of a first target is learned, and on second information including a second image, which is obtained by irradiation with the charged particle beam.
1. A charged particle beam apparatus, which is configured to automatically fabricate a sample piece from a sample, the charged particle beam apparatus comprising:
a charged particle beam irradiation optical system configured to radiate a charged particle beam;
a sample stage configured to move the sample that is placed on the sample stage;
a sample piece transportation unit configured to hold and convey the sample piece separated and extracted from the sample;
a holder fixing base configured to hold a sample piece holder to which the sample piece is transported; and
a computer configured to perform position control with respect to a second target, based on a machine learning model in which first information including a first image of a first target is learned, and on second information including a second image, which is obtained by irradiation with the charged particle beam.
2. The charged particle beam apparatus according to claim 1 , wherein the second target includes a part of a sample table included in the sample piece holder.
3. The charged particle beam apparatus according to claim 1 , wherein the second target includes a needle to be used in the sample piece transportation unit.
4. The charged particle beam apparatus according to claim 2 , wherein the second target includes a needle to be used in the sample piece transportation unit.
5. The charged particle beam apparatus according to claim 1 ,
wherein the second target includes the sample piece, and
wherein the first image is an image indicating a position at which the sample piece transportation unit is to be brought close to the sample piece in a sample extraction step of extracting the sample piece.
6. The charged particle beam apparatus according to claim 1 ,
wherein the second target includes the sample piece, and
wherein the first image is an image indicating a position at which the sample piece is to be separated and extracted from the sample.
7. The charged particle beam apparatus according to claim 1 , wherein the first image is a pseudo image generated to suit a type of the second target, wherein the type of the second target is a sample piece, a needle, or an object to which the sample is transported.
8. The charged particle beam apparatus according to claim 1 , wherein the first target and the second target are of a same type, wherein the same type of the first target and the second target is a sample piece, a needle, or an object to which the sample is transported.