IP Library Granted Patent US 11,588,301
Granted Patent B2
US 11,588,301 · App. 17/033,963 · Granted Feb 21, 2023

Vertical cavity surface emitting laser device

Inventors: Chung-Yu Hong (Hsinchu, TW); Yu-Chen Lin (Hsinchu, TW); Gang-Wei Fan (Hsinchu, TW)
Assignee: Lextar Electronics Corporation
H01S5/423H01S5/0206H01S5/02476H01S5/183H01S5/18308
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Quick Facts
Patent No.
US 11,588,301
App. No.
17/033,963
Granted
Feb 21, 2023
Kind
B2
Abstract

A VCSEL device includes an N-type metal substrate and laser-emitting units on the N-type metal substrate. Each laser-emitting unit includes an N-type contact layer in contact with the N-type metal substrate; an N-type Bragg reflector layer in contact with the N-type contact layer; a P-type Bragg reflector layer above the N-type Bragg reflector layer; an active emitter layer between the P-type Bragg reflector layer and the N-type Bragg reflector layer; a current restriction layer between the active emitter layer and the P-type Bragg reflector layer; a P-type contact layer in contact with the P-type Bragg reflector layer; and an insulation sidewall surrounding all edges of the N-type and P-type Bragg reflector layers, the N-type and P-type contact layers, the active emitter layer and the current restriction layer. A P-type metal substrate has through holes each aligned with a current restriction hole of a corresponding laser-emitting unit.

Claims (39)

1. A vertical cavity surface emitting laser device comprising:

an N-type metal substrate;

a plurality of laser-emitting units disposed on the N-type metal substrate, each laser-emitting unit comprising:

an N-type contact layer in contact with the N-type metal substrate;

an N-type Bragg reflector layer in contact with the N-type contact layer;

a P-type Bragg reflector layer disposed above the N-type Bragg reflector layer;

an active emitter layer disposed between the P-type Bragg reflector layer and the N-type Bragg reflector layer;

a current restriction layer disposed between the active emitter layer and the P-type Bragg reflector layer, wherein the current restriction layer has a current restriction hole;

a P-type contact layer in contact with the P-type Bragg reflector layer; and

an insulation sidewall surrounding and contacting all edges of the N-type and P-type Bragg reflector layers, the N-type and P-type contact layers, the active emitter layer and the current restriction layer;

a P-type metal substrate in contact with the P-type contact layer of each laser-emitting unit, the P-type metal substrate has a plurality of through holes, each through hole is aligned with the current restriction hole of a corresponding one of the laser-emitting units; and

an isolation block connected to the insulation sidewall of the laser-emitting units, and disposed between the P-type metal substrate and the N-type metal substrate, wherein the isolation block has a thickness ranging from 0.5 micron to 5 microns.

2. The vertical cavity surface emitting laser device of claim 1 , wherein the isolation block is not overlapped with the N-type contact layer.

3. The vertical cavity surface emitting laser device of claim 1 , wherein the P-type metal substrate has a portion disposed between any immediately-adjacent two of the insulation sidewalls of the laser-emitting units.

4. The vertical cavity surface emitting laser device of claim 1 , wherein a vertical projection of the P-type Bragg reflector layer on the active emitter layer is substantially equal to a vertical projection of the N-type Bragg reflector layer on the active emitter layer.

5. The vertical cavity surface emitting laser device of claim 1 , wherein the P-type metal substrate has a thickness ranging from 3 microns to 15 microns.

6. The vertical cavity surface emitting laser device of claim 1 , wherein the N-type metal substrate has a thickness ranging from 30 microns to 100 microns.

7. The vertical cavity surface emitting laser device of claim 1 , wherein a distance between immediately-adjacent two of the insulation sidewalls of the laser-emitting units ranges from 5 microns to 50 microns.

8. The vertical cavity surface emitting laser device of claim 1 , wherein the insulation sidewall has a thickness ranging from 0.1 micron to 2 microns.

9. A vertical cavity surface emitting laser device comprising:

an N-type metal substrate;

a plurality of laser-emitting units disposed on the N-type metal substrate, each laser-emitting unit comprising:

an N-type contact layer in contact with the N-type metal substrate;

an N-type Bragg reflector layer in contact with the N-type contact layer;

a P-type Bragg reflector layer disposed above the N-type Bragg reflector layer;

an active emitter layer disposed between the P-type Bragg reflector layer and the N-type Bragg reflector layer;

a current restriction layer disposed between the active emitter layer and the P-type Bragg reflector layer, wherein the current restriction layer has a current restriction hole;

a P-type contact layer in contact with the P-type Bragg reflector layer; and

an insulation sidewall surrounding and contacting all edges of the N-type and P-type Bragg reflector layers, the N-type and P-type contact layers, the active emitter layer and the current restriction layer;

a P-type metal substrate in contact with the P-type contact layer of each laser-emitting unit, the P-type metal substrate has a plurality of through holes, each through hole is aligned with the current restriction hole of a corresponding one of the laser-emitting units; and

an isolation block connected to the insulation sidewall of the laser-emitting units, and disposed between the P-type metal substrate and the N-type metal substrate, wherein a vertical projection of the P-type contact layer on the active emitter layer is substantially equal to a vertical projection of the N-type contact layer on the active emitter layer.

10. The vertical cavity surface emitting laser device of claim 9 , wherein the isolation block is not overlapped with the N-type contact layer.

11. The vertical cavity surface emitting laser device of claim 9 , wherein the P-type metal substrate has a portion disposed between any immediately-adjacent two of the insulation sidewalls of the laser-emitting units.

12. The vertical cavity surface emitting laser device of claim 9 , wherein a vertical projection of the P-type Bragg reflector layer on the active emitter layer is substantially equal to a vertical projection of the N-type Bragg reflector layer on the active emitter layer.

13. The vertical cavity surface emitting laser device of claim 9 , wherein the P-type metal substrate has a thickness ranging from 3 microns to 15 microns.

14. The vertical cavity surface emitting laser device of claim 9 , wherein the N-type metal substrate has a thickness ranging from 30 microns to 100 microns.

15. The vertical cavity surface emitting laser device of claim 9 , wherein a distance between immediately-adjacent two of the insulation sidewalls of the laser-emitting units ranges from 5 microns to 50 microns.

16. The vertical cavity surface emitting laser device of claim 9 , wherein the insulation sidewall has a thickness ranging from 0.1 micron to 2 microns.

17. The vertical cavity surface emitting laser device of claim 9 , wherein the isolation block has a thickness ranging from 0.5 micron to 5 microns.

Assignments (2)
MERGER Recorded Mar 27, 2026
From: LEXTAR ELECTRONICS CORPORATION
To: ENNOSTAR CORPORATION
Reel/Frame 075286/0822 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2020
From: HONG, CHUNG-YU; LIN, YU-CHEN; FAN, GANG-WEI
To: LEXTAR ELECTRONICS CORPORATION
Reel/Frame 053909/0073 →