Integrated transmission electron microscope
View Patent ↗An integrated transmission electron microscope comprising multiple electron sources for tuned beams of ultrafast, scanning probe, and parallel illumination in varied beam energies can be alternated within sub-microseconds onto a sample with dynamic ‘transient state’ processes to acquire atomic-scale structural/chemical data with site specificity. The various electron sources and condenser optics enable high-resolution imaging, high-temporal resolution imaging, and chemical imaging, using fast-switching magnets to direct the different electron beams onto a single maneuverable objective pole piece where the sample resides. Such multimodal in situ characterization tools housed in a single microscope have the potential to revolutionize materials science.
1. An integrated transmission electron microscope, comprising:
an electron illumination system, comprising
at least two electron sources with associated condenser lenses, each providing a separate electron beam, and
an incident beam electrostatic deflector to direct one of the electron beams to illuminate an electron-transparent sample and deflect the remaining electron beams to one or more beam dumps;
a sample chamber, comprising
a sample holder to hold and manipulate the sample,
an upper objective lens to collimate the illuminating beam on the sample, and
a lower objective lens to image a transmitted beam; and
a detection chamber, comprising at least two detectors, and
a projection system comprising a projection lens and a transmitted beam electrostatic deflector to project and deflect the transmitted beam image onto one of the at least two detectors.
2. The integrated transmission electron microscope of claim 1 , wherein the at least two electron sources and associated condenser lenses comprises at least one of an aberration-corrected transmission electron microscope (TEM), an ultrafast pulsed TEM, and a scanning probe TEM.
3. The integrated transmission electron microscope of claim 1 , wherein the incident beam electrostatic deflector can redirect the at least two electron beams within a time frame of less than one microsecond.
4. The integrated transmission electron microscope of claim 1 , wherein a gap between pole pieces of the upper objective lens and the lower objective lens is adjustable.