Light-emitting diode structure, fabrication method therefor, and display panel
A light-emitting diode structure, a fabrication method therefor, and a display panel. The light-emitting diode structure includes: a base substrate; and a first electrode layer, a light-emitting layer and a second electrode layer that are successively stacked on the base substrate, wherein the second electrode layer includes a first coarse surface that is located at a side far from the base substrate.
1. A fabrication method of a light-emitting diode structure, comprising:
providing a base substrate;
sequentially forming a first electrode layer and a light-emitting layer on the base substrate;
arranging a first mask and a second mask which are stacked with each other on a side of the light-emitting layer facing away from the base substrate, a spacing being set between the first mask and the second mask; and
forming a second electrode layer on the base substrate on which the first electrode layer and the light-emitting layer are formed by adopting the first mask and the second mask,
wherein the first mask includes at least one first opening and a first shielding portion surrounding the at least one first opening, the second mask includes a plurality of second openings and a second shielding portion surrounding the plurality of second openings, and orthogonal projections of the plurality of second openings on the first mask are located within the at least one first opening,
forming the second electrode layer on the base substrate on which the first electrode layer and the light-emitting layer are formed by adopting the first mask and the second mask includes:
enabling the electrode material to sequentially pass through each second opening of the second mask and the at least one first opening of the first mask so as to form the second electrode layer, a plurality of protrusions being formed on the surface of the second electrode layer away from the base substrate.
2. The fabrication method according to claim 1 , wherein the first mask and the second mask have shielding patterns different from each other, so that a part of an electrode material passing through the first mask is shielded by the second mask.
3. The fabrication method according to claim 1 , wherein the plurality of second openings are arranged in an array mode, and a size of each second opening is 10 microns to 100 microns.
4. The fabrication method according to claim 1 , further comprising:
forming a first transport layer on a side of the light-emitting layer close to the second electrode layer,
wherein the first mask is attached to the first transport layer and is in contact with the first transport layer.
5. The fabrication method according to claim 1 , wherein the spacing between the first mask and the second mask is 5 millimeters to 15 millimeters.
6. The fabrication method according to claim 1 , wherein the second electrode layer is formed by a magnetron sputtering method.