IP Library Granted Patent US 11,569,081
Granted Patent B2
US 11,569,081 · App. 17/043,406 · Granted Jan 31, 2023

Method for analyzing metal fine particles, and inductively coupled plasma mass spectrometry method

Inventors: Katsuhiko Kawabata (Tokyo, JP); Tatsuya Ichinose (Tokyo, JP); Kohei Nishiguchi (Tokyo, JP)
Assignee: IAS INC.
H01J49/105G01N27/623H01J49/0009H01J49/04
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Quick Facts
Patent No.
US 11,569,081
App. No.
17/043,406
Granted
Jan 31, 2023
Kind
B2
Abstract

The present invention provides a method for analyzing a sample containing metal fine particles with an inductive coupling plasma mass spectrometer. The method enables analysis of the sample without the need of standard metal fine particles. Specifically, the present invention relates to a method for analyzing metal fine particles in liquid by use of an inductive coupling plasma mass spectrometer. In the method, the analysis apparatus is provided with a standard solution introduction apparatus including a standard solution storage unit for storing a standard solution containing a specific element in a known concentration, a syringe pump for suctioning and discharging the standard solution, and a solution introduction unit having a standard solution nebulizer and a standard solution spray chamber that are supplied with the standard solution, the standard solution is directly supplied to the standard solution nebulizer at a flow rate of 3 μL/min or less.

Claims (11)

1. An inductive coupling plasma mass spectrometry method for analyzing a metal fine particle number and a metal fine particle concentration by use of a standard solution sensitivity value in a method for analyzing metal fine particles in liquid by use of an inductive coupling plasma mass spectrometer,

said method for analyzing metal fine particles in liquid by use of an inductive coupling plasma mass spectrometer comprising: a sample storage section for storing a sample solution to be measured; a sample introduction section having a sample nebulizer and a sample spray chamber; a torch section for ionizing the sample by forming a plasma; an interface section for taking ions from the plasma; a mass analysis section for separating ions; and a detection section for detecting the separated ions, wherein

the inductive coupling plasma mass spectrometer is provided with a standard solution introduction apparatus comprising a standard solution storage unit for storing a standard solution containing a specific element in a known concentration, a syringe pump for suctioning and discharging the standard solution, and a solution introduction unit having a standard solution nebulizer and a standard solution spray chamber that are supplied with the standard solution,

a standard solution introduction passage for introducing the standard solution flowing out from the standard solution spray chamber is connected to a flow passage connecting the sample introduction section to the torch section,

the standard solution is directly supplied to the standard solution nebulizer at a flow rate of 3 μL/min or less to introduce the standard solution into the torch section from the solution introduction unit, and a standard solution sensitivity value that is a specific element weight per standard solution signal intensity count is determined based on a standard solution signal intensity obtained from a detector and a physical amount of the introduced specific element, and

a particle diameter value of metal fine particles of the specific element is calculated from a sample solution signal count number of one metal fine particle of the specific element, which is obtained from the detector by introduction of the sample solution, and the standard solution sensitivity value;

said inductive coupling plasma mass spectrometry method comprising the steps of:

introducing a sample standard solution containing a specific element in a known concentration into the torch section from the sample introduction section, and calculating a sample introduction section sensitivity value that is a specific element weight per sample standard solution signal intensity count from a sample standard solution signal intensity obtained from the detector,

calculating transmission efficiency of the sample spray chamber from the standard solution sensitivity value and the sample introduction section sensitivity value,

calculating the number of specific element metal fine particles contained in the sample solution from the number of specific element metal fine particles obtained from the detector by introducing a sample solution to be measured into the torch section from the sample introduction section, using the transmission efficiency of the sample spray chamber, and calculating a total weight of specific element metal fine particles contained in the sample solution from a total integrated value of specific element metal fine particle signal intensities obtained from the detector by introduction of the sample solution, the standard solution sensitivity value and the transmission efficiency of the spray chamber, and

calculating a metal fine particle concentration of the sample solution from a sample solution introduction rate obtained from a flow rate detection unit provided between the sample storage section and the sample introduction section, and the calculated total weight of specific element metal fine particles.

Assignments (3)
CHANGE OF NAME Recorded Feb 15, 2026
From: IAS INC.
To: RORZE IAS INC.
Reel/Frame 074867/0402 →
CHANGE OF NAME Recorded Oct 24, 2025
From: IAS INC.
To: RORZE IAS INC.
Reel/Frame 073257/0472 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 29, 2020
From: KAWABATA, KATSUHIKO; ICHINOSE, TATSUYA; NISHIGUCHI, KOHEI
To: IAS INC.
Reel/Frame 053921/0334 →
Continuity (1)
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Cited By (1)
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