Magnet chuck
A magnet chuck has a piston assembly including a tube shaped permanent magnet and a core yoke able to move on the interior of a cylinder tube. The permanent magnet is provided on the outer periphery of the core yoke, is magnetized in the radial direction, and a magnetic sensor is attached to the side surface of the cylinder tube.
1. A magnetic chuck in which a piston assembly including a tubular permanent magnet and a core yoke is provided movably inside a cylinder tube, wherein
the permanent magnet is provided around the core yoke and is magnetized in a radial direction, and a magnetic sensor configured to detect a magnetic flux of the permanent magnet is attached to a side surface of the cylinder tube,
the magnetic chuck is configured to detect whether a workpiece is being attracted and held in accordance with whether the magnetic sensor responds in a case where the piston assembly is positioned at a movement end of the piston assembly,
a cover yoke is provided around the permanent magnet,
an outer yoke that faces an outer periphery of the piston assembly at the movement end of the piston assembly is provided at one end in an axial direction of the cylinder tube, and
a damper configured to abut on a step of the cover yoke is attached between the cylinder tube and the outer yoke.
2. The magnetic chuck according to claim 1 , wherein a bottom yoke that faces the core yoke is provided at one end in an axial direction of the cylinder tube.
3. The magnetic chuck according to claim 2 , wherein the bottom yoke fits into a recess of the core yoke at a movement end of the piston assembly.
4. The magnetic chuck according to claim 1 , wherein a latch yoke that faces the piston assembly is provided at another end in an axial direction of the cylinder tube.