Substrate storing container
A substrate storing container includes: a container main body including a tubular wall portion, the container main body having a substrate storing space which is formed by an inner face of the wall portion, is able to store a plurality of substrates, and communicates with the container main body opening portion; a lid body which is removably attached to the container main body opening portion and is able to close the container main body opening portion; a ventilation passage which allows the substrate storing space and an external space of the container main body to communicate with each other, wherein the ventilation passage is formed in a ventilation passage forming unit which is insert-molded with the container main body.
1. A substrate storing container, comprising:
a container main body including a tubular wall portion having at one end portion thereof an opening peripheral portion at which a container main body opening portion is formed, and another end portion closed, wherein the container main body having a substrate storing space which is formed by an inner face of the wall portion, is able to store a plurality of substrates, and communicates with the container main body opening portion;
a lid body removably attached to the container main body opening portion and configured to be able to close the container main body opening portion;
a ventilation passage allowing the substrate storing space and an external space of the container main body to communicate with each other; and
a ventilation passage forming unit,
wherein the ventilation passage is formed in the ventilation passage forming unit which is insert-molded with the container main body,
the ventilation passage forming unit is an assembly of a plurality of components, the ventilation passage forming unit comprises:
a first component which is insert-molded with the container main body and forms a portion through which gas flows into the ventilation passage in the ventilation passage forming unit; and
a second component which is insert-molded with the container main body and with which the gas that has flows into the ventilation passage of the ventilation passage forming unit collides to change a flow direction of the gas,
wherein the substrate storing container further comprises:
a gas spray nozzle unit passing through a through-hole formed in the second component and is fixed to the ventilation passage forming unit, and
an additional component removably attached to the ventilation passage forming unit,
wherein the additional component is configured as an inlet filter unit, and
the gas spray nozzle unit is fixed to the first component of the ventilation passage forming unit such that the gas spray nozzle unit and the first component hold the second component therebetween.
2. The substrate storing container of claim 1 , wherein the ventilation passage forming unit includes at least one of the ventilation passage.