Resonator structure, imaging element, and electronic apparatus
There is provided a resonator structure that obtains a highly accurate optical spectrum. The resonator structure includes a stacked structure that includes a semiconductor layer, a first resonator, a first reflection layer, a second resonator, a second reflection layer stacked in this order, allows light of a specific wavelength band to be transmitted therethrough, the semiconductor layer having a first average refractive index, the first resonator having a second average refractive index lower than the first average refractive index, and the first reflection layer having a third average refractive index higher than the second average refractive index.
1. A resonator structure, comprising:
a stacked structure that includes a semiconductor layer, a first resonator, a first reflection layer, a second resonator, a second reflection layer stacked in this order, wherein
a thickness of the first resonator is less than or equal to 400 nm,
the stacked structure allows transmission of light of a specific wavelength band,
the semiconductor layer has a first average refractive index,
the first resonator has a second average refractive index lower than the first average refractive index, and
the first reflection layer has a third average refractive index higher than the second average refractive index.
2. The resonator structure according to claim 1 , wherein the second average refractive index is 1 or more and four or less.
3. The resonator structure according to claim 1 , wherein the second average refractive index is 1 or more and two or less.
4. The resonator structure according to claim 1 , wherein the second resonator has a refractive index distribution in a stacked plane.
5. The resonator structure according to claim 4 , wherein the second resonator includes:
a first portion that has a first refractive index, and
a second portion that is dispersed located in the first portion in the stacked plane, wherein the second portion has a second refractive index.
6. The resonator structure according to claim 1 , wherein the first reflection layer and the second reflection layer include a material including polycrystal silicon.
7. The resonator structure according to claim 6 , wherein each of a thickness of the first reflection layer and a thickness of the second reflection layer is 50 nm or less.
8. The resonator structure according to claim 1 , wherein
the first reflection layer and the second reflection layer include a material including polycrystal silicon, and
the first resonator and the second resonator include a material other than different from elemental silicon.
9. The resonator structure according to claim 8 , wherein a thickness of each of the first reflection layer and the second reflection layer is 50 nm or less.
10. The resonator structure according to claim 1 , further comprising a visible light cut filter that suppresses transmission of visible light.
11. The resonator structure according to claim 1 , wherein the first resonator includes a multilayer film structure in which a plurality of films is stacked.
12. The resonator structure according to claim 11 , wherein the plurality of films includes a material that includes at least one of silicon oxide, silicon nitride, tantalum oxide, or aluminum oxide.