Capacitor, semiconductor device including the same, and method of fabricating capacitor

1. A method of fabricating a capacitor, the method comprising:

forming a bottom electrode;

forming a dielectric film on the bottom electrode;

forming a doped Al 2 O 3 film on the dielectric film, the doped Al 2 O 3 film including a first dopant, and an oxide comprising a same element as the first dopant having a higher dielectric constant than a dielectric constant of Al 2 O 3 ; and

forming a top electrode on the doped Al 2 O 3 film, wherein

the forming the doped Al 2 O 3 film comprises forming an Al 2 O 3 film on the dielectric film and performing a heat treatment on the dielectric film and the Al 2 O 3 film,

the dielectric film comprises an oxide of an element that is the same as the first dopant,

the performing the heat treatment includes diffusing the element that is the same as the first dopant from the dielectric film into the Al 2 O 3 film by the heat treatment to provide the doped Al 2 O 3 film, and

the first dopant is Ca, Sr, Ba, Sc, Y, La, Ti, Hf, Zr, Nb, Ta, Ce, Pr, Nd, Gd, Dy, Yb, or Lu.

2. A method of fabricating a capacitor, the method comprising:

forming a bottom electrode;

forming a dielectric film on the bottom electrode;

forming a doped Al 2 O 3 film on the dielectric film, the doped Al 2 O 3 film including a first dopant, and an oxide comprising a same element as the first dopant having a higher dielectric constant than a dielectric constant of Al 2 O 3 ; and

forming a top electrode on the doped Al 2 O 3 film, wherein

the doped Al 2 O 3 film further comprises a second dopant that is different from the first dopant,

an oxide comprising a same element as the second dopant has a higher dielectric constant than the dielectric constant of Al 2 O 3 ,

the forming of the doped Al 2 O 3 film comprises forming an additional oxide film on the dielectric film, forming an Al 2 O 3 film on the additional oxide film, and performing a heat treatment,

the heat treatment is performed on the dielectric film, the additional oxide film, and the Al 2 O 3 film,

the dielectric film and the additional oxide film respectively comprise oxides comprising two different elements selected from among Ca, Sr, Ba, Sc, Y, La, Ti, Hf, Zr, Nb, Ta, Ce, Pr, Nd, Gd, Dy, Yb, and Lu,

the two different elements selected from among Ca, Sr, Ba, Sc, Y, La, Ti, Hf, Zr, Nb, Ta, Ce, Pr, Nd, Gd, Dy, Yb, and Lu, respectively in the dielectric film and the additional oxide film, are diffused into the Al 2 O 3 film by the heat treatment, and

the first dopant and the second dopant are respectively the two different elements selected from among Ca, Sr, Ba, Sc, Y, La, Ti, Hf, Zr, Nb, Ta, Ce, Pr, Nd, Gd, Dy, Yb, and Lu and diffused into the Al 2 O 3 film.

3. The method of claim 2 , wherein the doped Al 2 O 3 film comprises the first dopant and the second dopant in an amount greater than 0 at % and less than 50 at % in total.

4. A method of fabricating a capacitor, the method comprising:

forming a bottom electrode;

forming a dielectric film on the bottom electrode;

forming a doped Al 2 O 3 film on the dielectric film, the doped Al 2 O 3 film including a first dopant, and an oxide comprising a same element as the first dopant having a higher dielectric constant than a dielectric constant of Al 2 O 3 ; and

forming a top electrode on the doped Al 2 O 3 film,

wherein the forming the bottom electrode comprises

arranging a substrate in a reaction chamber and supplying a first source comprising a metal organic ligand into the reaction chamber,

performing a first purging for removing an organic ligand of the first source that is not adsorbed onto the substrate,

supplying a second source comprising a halogen compound into the reaction chamber,

performing a second purging for removing the organic ligand that has not reacted with the second source, and

supplying a nitridant into the reaction chamber.

5. The method of claim 4 , wherein

the metal organic ligand is represented by MR x (where M is a metal element and R is an organic ligand), and

x is in a range of 0<x≤6.

6. The method of claim 5 , wherein M is Be, B, Na, Mg, Al, Si, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, Ge, Rb, Sr, Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd, Ag, Cd, In, Sn, Sb, Te, Cs, Ba, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Hf, Ta, W, Re, Os, Ir, Pt, Au, Hg, Tl, Pb, Bi, Po, Fr, Ra, Ac, Th, Pa, or U.

7. The method of claim 5 , wherein

R comprises at least one of a C1-C10 alkyl group, a C2-C10 alkenyl group, a carbonyl group (C═O), a halide, a C6-C10 aryl group, a C6-C10 cycloalkyl group, a C6-C10 cycloalkenyl group, (C═O)R (where R is hydrogen or a C1-C10 alkyl group), a C1-C10 alkoxy group, a C1-C10 amidinate, a C1-C10 alkylamide, a C1-C10 alkylimide, —N(Q)(Q′) (where Q and Q′ are each independently a C1-C10 alkyl group or hydrogen), Q(C═O)CN (where Q is hydrogen or a C1-C10 alkyl group), and a C1-C10 β-diketonate.

8. The method of claim 4 , wherein

the halogen compound is represented by M′A y (where y is a real number greater than 0 and A is a halogen element), and

M′ is H, Li, Be, B, N, O, Na, Mg, Al, Si, P, S, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, Ge, As, Se, Rb, Sr, Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd, Ag, Cd, In, Sn, Sb, Te, Cs, Ba, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Hf, Ta, W, Re, Os, Ir, Pt, Au, Hg, Tl, Pb, Bi, Po, Fr, Ra, Ac, Th, Pa, or U.

9. The method of claim 8 , wherein

A comprises at least one of F, Cl, Br, and I, and

y is in a range of 0<y≤6.

10. The method of claim 4 , wherein the supplying the first source, the supplying the second source, and the supplying the nitridant each are performed using an atomic layer deposition (ALD) process.

11. The method of claim 4 , wherein the nitridant comprises at least one of NH 3 , N 2 H 2 , N 3 H, and N 2 H 4 .

12. The method of claim 4 , further comprising:

performing a heat treatment for removing a halogen element of the halogen compound, the halogen element remaining as a reaction by-product.

13. The method of claim 4 , wherein the bottom electrode comprises carbon impurities in an amount greater than 0% and less than or equal to 1%.