Semiconductor device, solid-state imaging device and electronic apparatus
A semiconductor device including a first semiconductor section including a first wiring layer at one side thereof, the first semiconductor section further including a photodiode, a second semiconductor section including a second wiring layer at one side thereof, the first and second semiconductor sections being secured together, a third semiconductor section including a third wiring layer at one side thereof, the second and the third semiconductor sections being secured together such the first semiconductor section, second semiconductor section, and the third semiconductor section are stacked together, and a first conductive material electrically connecting at least two of (i) the first wiring layer, (ii) the second wiring layer, and (iii) the third wiring layer such that the electrically connected wiring layers are in electrical communication.
1. A light detecting device, comprising:
a first section including a first semiconductor substrate and a first wiring layer;
an insulating film layer;
an aluminum pad disposed in the insulating film layer;
a second section including a second semiconductor substrate and a second wiring layer;
a third section including a third semiconductor substrate and a third wiring layer; and
a first contact,
wherein a first side of the insulating film layer faces the first wiring layer,
wherein a second side of the insulating film layer faces the second semiconductor substrate,
wherein the second wiring layer faces the third wiring layer, and
wherein the aluminum pad is connected to the second wiring layer by the first contact.
2. The light detecting device of claim 1 , further comprising:
a pad hole, wherein the pad hole is formed in the first section.
3. The light detecting device of claim 2 , wherein the pad hole extends through the first semiconductor substrate and the first wiring layer, and reaches the aluminum pad.
4. The light detecting device of claim 2 , wherein at least a portion of a first surface of the aluminum pad forms a bottom of the hole.
5. The light detecting device of claim 4 , wherein at least another portion of the first surface of the aluminum pad is in contact with the first wiring layer.
6. The light detecting device of claim 5 , wherein the first contact extends between opposite surfaces of the second substrate.
7. The light detecting device of claim 6 , wherein the first contact is partially disposed within the insulating film layer.
8. The light detecting device of claim 2 , wherein the pad hole is formed in a light receiving surface side of the first section.
9. The light detecting device of claim 8 , wherein the first section includes a plurality of photodiodes.
10. Light detecting device of claim 9 , wherein the first section further includes at least one of a transfer transistor, a reset transistor, or an amplification transistor.
11. The light detecting device of claim 9 , wherein the second section includes a plurality of transistors.
12. The light detecting device of claim 11 , wherein the third section includes a plurality of transistors.
13. The light detecting device of claim 9 , wherein the pad hole is disposed at a region other than a region including the plurality of photodiodes.
14. The light detecting device of claim 9 , wherein the second section includes a logic circuit, and wherein the third section includes a memory circuit.
15. The light detecting device of claim 1 , wherein the second section and the third section are electrically connected to each other through a second contact.
16. The light detecting device of claim 15 , wherein the second contact electrically connects the first wiring layer and the second wiring layer.
17. The light detecting device of claim 16 , wherein a first portion of the second contact extends through the second semiconductor substrate and the second wiring layer and partially penetrates the third wiring layer, and wherein a second portion of the second contact extends through the second semiconductor substrate and partially penetrates the second wiring layer.
18. The light detecting device of claim 17 , wherein at least a third portion of the second contact is formed in the insulating film layer and connects the first portion of the second contact to the second portion of the second contact.
19. An electronic apparatus, comprising:
an optical unit including a lens group; and
a light detecting device receiving incident light, the light detecting device including:
a first section including a first semiconductor substrate and a first wiring layer;
an insulating film layer;
an aluminum pad disposed in the insulating film layer;
a second section including a second semiconductor substrate and a second wiring layer;
a third section including a third semiconductor substrate and a third wiring layer; and
a first contact,
wherein a first side of the insulating film layer faces the first wiring layer,
wherein a second side of the insulating film layer faces the second semiconductor substrate,
wherein the second wiring layer faces the third wiring layer, and
wherein the aluminum pad is connected to the second wiring layer by the first contact.
20. An imaging device, comprising:
a first section including a first semiconductor substrate and a first wiring layer, the first substrate including a plurality of photodiodes;
an insulating film layer;
an aluminum pad disposed in the insulating film layer;
a second section including a second semiconductor substrate and a second wiring layer, the second semiconductor substrate including a plurality of transistors;
a third section including a third semiconductor substrate and a third wiring layer, the third semiconductor substrate including a plurality of transistors; and
a first contact,
wherein a first side of the insulating film layer faces the first wiring layer,
wherein a second side of the insulating film layer faces the second semiconductor substrate,
wherein the second wiring layer faces the third wiring layer, and
wherein the aluminum pad is connected to the second wiring layer by the first contact.