Crystal growth apparatus including heater with multiple regions and crystal growth method therefor
A crystal growth apparatus according to the present embodiment includes a crucible, a heater which is installed on an outward side of the crucible and surrounds the crucible, and a coil which is installed on an outward side of the heater and surrounds the heater, in which an inner surface of the heater on the crucible side includes a first region, and a second region which is further away from an outer side surface of the crucible than the first region is.
1. A crystal growth apparatus comprising:
a crucible;
a heater which is installed on an outward side of the crucible and surrounds the crucible; and
a coil which is installed on an outward side of the heater and surrounds the heater,
wherein
an inner surface of the heater on a crucible side includes:
a first region facing an upper portion of the crucible, and
a second region facing a vertically lower portion of the crucible, wherein the second region is further away in a horizontal direction from an outer side surface of the crucible than the first region,
wherein the inner surface of the heater has a step between the first region and the second region, and a radiation which goes from the second region toward the upper portion of the crucible is shielded by the step.
2. The crystal growth apparatus according to claim 1 , wherein the inner surface of the heater is continuously and smoothly connected between the first region and the second region.
3. The crystal growth apparatus according to claim 1 , wherein
the crucible includes a raw material setting region and a crystal setting part therein,
the raw material setting region and the crystal setting part face each other,
the first region surrounds the crystal setting part, and
the second region surrounds the raw material setting region.
4. The crystal growth apparatus according to claim 1 , wherein a shortest distance between the second region and the outer side surface of the crucible is twice a shortest distance between the first region and the outer side surface of the crucible or more.
5. A crystal growth method which uses a crystal growth apparatus including:
a crucible;
a heater which is installed on an outward side of the crucible and surrounds the crucible; and
a coil which is installed on an outward side of the heater and surrounds the heater, wherein
an inner surface of the heater on a crucible side includes: a first region facing an upper portion of the crucible, and a second region facing a vertically lower portion of the crucible,
wherein the inner surface of the heater has a step between the first region and the second region, and a radiation which goes from the second region toward the upper portion of the crucible is shielded by the step
the crystal growth method comprising:
controlling an amount of radiation which reaches the crucible from the heater by setting the second region to be further away in a horizontal direction from an outer side surface of the crucible than the first region.
6. The crystal growth method according to claim 5 , wherein the first region and the second region are continuously and smoothly connected.
7. The crystal growth method according to claim 5 , wherein
the crucible includes a raw material setting region and a crystal setting part therein,
the raw material setting region and the crystal setting part face each other,
the first region surrounds the crystal setting part, and
the second region surrounds the raw material setting region.
8. The crystal growth method according to claim 5 , wherein a shortest distance between the second region and the outer side surface of the crucible is twice a shortest distance between the first region and the outer side surface of the crucible or more.