Apparatus and method for treating substrate
An apparatus for treating a substrate includes a process chamber having a process space inside, a support unit that supports the substrate in the process space, a heating unit that is provided inside the support unit and that heats the substrate, an exhaust unit that evacuates the process space, and a gas supply unit that supplies a gas into the process space, and the gas supply unit supplies the gas at a temperature selected from a first temperature and a second temperature.
1. An apparatus for treating a substrate, the apparatus comprising:
a process chamber having a process space inside;
a support unit configured to support the substrate in the process space;
a heating unit inside the support unit and configured to heat the substrate;
an exhaust unit configured to evacuate the process space;
a gas supply unit configured to supply a gas into the process space; and
a controller,
wherein the gas supply unit includes a first supply unit and a second supply unit, and the gas supply unit is configured to supply the gas having a temperature determined based on a thickness of a liquid film on the substrate in the process space,
wherein the first supply unit includes a first supply tube configured to directly supply the gas at a first temperature into the process space,
wherein the second supply unit includes,
a second supply tube configured to supply the gas,
a buffer space being above the support unit and configured to receive the gas through the second supply tube,
a heater configured to heat the gas in the buffer space,
a dispensing space vertically between the buffer space and the support unit and fluidically connected to the buffer space, the dispensing space configured to receive the heated gas from the buffer space, and provide the heated gas as the gas of a second temperature to the process space, and
a partitioning plate configured to partition an interior space of the second supply unit into the buffer space and the dispensing space,
wherein the controller is configured to control the first and second supply units based on the thickness of the liquid film on the substrate in the process space,
wherein the partitioning plate is spaced apart from an upper body of the process chamber,
wherein the exhaust unit includes a plurality of exhaust holes, and
wherein the least one exhaust hole of the plurality of exhaust holes is arranged in the upper body of the process chamber and is upwardly spaced apart from the partitioning plate.
2. The apparatus of claim 1 , wherein the first supply unit is configured to pass the gas through the buffer space and the dispensing space.
3. The apparatus of claim 1 , wherein
the partitioning plate having a first hole formed therein,
a dispensing plate having a second hole formed therein for dispensing the gas in the dispensing space into the process space, and
the partitioning plate faces a central region of the substrate, and the dispensing plate faces an entire region of the substrate.
4. The apparatus of claim 1 , wherein dispensing openings of the first supply unit and the second supply unit face a central region of the substrate.
5. The apparatus of claim 1 , wherein the gas supply unit includes:
a measurement device configured to measure the thickness of the liquid film formed on the substrate; and
the controller is configured to receive the thickness of the liquid film on the substrate that is measured by the measurement device.
6. The apparatus of claim 5 , wherein
based on the thickness of the liquid film on the substrate that is measured by the measurement device, the controller is configured to
supply the gas at the second temperature when the thickness of the liquid film formed on a central region of the substrate is greater than or equal to a value, and
supply the gas at the first temperature when the thickness of the liquid film formed on the central region of the substrate is smaller than the value, and
the controller is further configured to control the gas supply unit to continually supply the gas until the thickness of the liquid film on the central region of the substrate reaches the value.
7. The apparatus of claim 5 , wherein
based on the thickness of the liquid film on the substrate that is measured by the measurement device, the controller is configured to supply the gas at the second temperature when the thickness of the liquid film formed on a central region of the substrate is greater than or equal to a value, and
the controller is further configured to control the gas supply unit to increase a flow rate of the gas as the thickness of the liquid film on the central region of the substrate is increased and to continually supply the gas until the thickness of the liquid film formed on the central region of the substrate reaches the value.