Laser chip for flip-chip bonding on silicon photonics chips
A laser chip for flip-chip bonding on a silicon photonics chip with passive alignment features. The laser chip includes a chip body made of a p-region and a n-region in vertical direction and extended from a front facet to a rear facet in longitudinal direction, a pair of first vertical stoppers formed respectively beyond two sides of the chip body based on a wider width of the n-region, an active region buried in the chip body between the p-region and the n-region in the vertical direction and extended from the front facet to the rear facet in the longitudinal direction, an alignment mark formed on a top surface of the p-region near the front facet with a lateral distance defined in sub-micron precision relative to the active region; and a thin metal film on the surface of the p-region having a cleaved edge shared with the front facet.
1. A laser chip for flip-chip bonding to a silicon photonics chip comprising a waveguide, the laser chip comprising:
an active region disposed in the laser chip along a plane parallel to the waveguide in the silicon photonics chip; and
a first pair of stoppers formed on the laser chip to mate with a second pair of stoppers formed on the silicon photonics chip when the laser chip is bonded to a bonding site on the silicon photonics chip, the first and second pairs of stoppers extending along an axis perpendicular to the plane, at least one of the first pair of stoppers and the second pair of stoppers being configured to align the active region away from the waveguide towards the bonding site on the silicon photonics chip,
wherein due to the alignment, the waveguide is at a first distance from the bonding site, the active region is at a second distance from the bonding site, the first and second distances being along the axis perpendicular to the plane parallel to the waveguide, the first distance being greater than the second distance.
2. The laser chip of claim 1 wherein the alignment of the active region relative to the waveguide along the axis is configured to limit an optical loss of optical coupling between the active region and the waveguide to less than or equal to 3 dB.
3. The laser chip of claim 1 further comprising a first pair of alignment marks disposed symmetrically on either side of the active region, the first pair of alignment marks being configured to align with a second pair of alignment marks on the bonding site on the silicon photonics chip to align the active region relative to the waveguide along the plane parallel to the waveguide.
4. The laser chip of claim 3 further comprising a metal film with an edge shared with an end of the active region facing the waveguide, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
5. The laser chip of claim 1 further comprising a metal film with an edge shared with an end of the active region facing the waveguide, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
6. The laser chip of claim 1 wherein the active region extends between a front facet and a rear facet that are disposed along the plane parallel to the waveguide with the front facet facing the waveguide, the active region being disposed between an n-type doped region and a p-type doped region with the p-type doped region being narrower than the n-type doped region and being bonded to the bonding site on the silicon photonics chip, and the first pair of stoppers extending from the n-type doped region parallel to the p-type doped region.
7. The laser chip of claim 6 further comprising a first pair of alignment marks disposed on a surface of the p-type doped region facing the bonding site on the silicon photonics chip, the first pair of alignment marks being configured to align with a second pair of alignment marks on the bonding site on the silicon photonics chip to align the active region relative to the waveguide along the plane parallel to the waveguide.
8. The laser chip of claim 7 further comprising a metal film with an edge shared with the front facet, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
9. The laser chip of claim 6 further comprising a metal film with an edge shared with the front facet, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
10. A laser chip for flip-chip bonding to a silicon photonics chip comprising a waveguide, the laser chip comprising:
an active region disposed in the laser chip along a plane parallel to the waveguide in the silicon photonics chip;
a first pair of stoppers formed on the laser chip to mate with a second pair of stoppers formed on the silicon photonics chip when the laser chip is bonded to a bonding site on the silicon photonics chip, the first and second pairs of stoppers extending along an axis perpendicular to the plane, at least one of the first pair of stoppers and the second pair of stoppers being configured to align the active region away from the waveguide towards the bonding site on the silicon photonics chip; and
a metal film with an edge shared with an end of the active region facing the waveguide, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
11. A laser chip for flip-chip bonding to a silicon photonics chip comprising a waveguide, the laser chip comprising:
an active region disposed in the laser chip along a plane parallel to the waveguide in the silicon photonics chip;
a first pair of stoppers formed on the laser chip to mate with a second pair of stoppers formed on the silicon photonics chip when the laser chip is bonded to a bonding site on the silicon photonics chip, the first and second pairs of stoppers extending along an axis perpendicular to the plane, at least one of the first pair of stoppers and the second pair of stoppers being configured to align the active region away from the waveguide towards the bonding site on the silicon photonics chip;
a first pair of alignment marks disposed symmetrically on either side of the active region, the first pair of alignment marks being configured to align with a second pair of alignment marks on the bonding site on the silicon photonics chip to align the active region relative to the waveguide along the plane parallel to the waveguide; and
a metal film with an edge shared with an end of the active region facing the waveguide, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
12. A laser chip for flip-chip bonding to a silicon photonics chip comprising a waveguide, the laser chip comprising:
an active region disposed in the laser chip along a plane parallel to the waveguide in the silicon photonics chip; and
a first pair of stoppers formed on the laser chip to mate with a second pair of stoppers formed on the silicon photonics chip when the laser chip is bonded to a bonding site on the silicon photonics chip, the first and second pairs of stoppers extending along an axis perpendicular to the plane, at least one of the first pair of stoppers and the second pair of stoppers being configured to align the active region away from the waveguide towards the bonding site on the silicon photonics chip; and
wherein the active region extends between a front facet and a rear facet that are disposed along the plane parallel to the waveguide with the front facet facing the waveguide, the active region being disposed between an n-type doped region and a p-type doped region with the p-type doped region being narrower than the n-type doped region and being bonded to the bonding site on the silicon photonics chip, and the first pair of stoppers extending from the n-type doped region parallel to the p-type doped region.
13. The laser chip of claim 12 further comprising a first pair of alignment marks disposed on a surface of the p-type doped region facing the bonding site on the silicon photonics chip, the first pair of alignment marks being configured to align with a second pair of alignment marks on the bonding site on the silicon photonics chip to align the active region relative to the waveguide along the plane parallel to the waveguide.
14. The laser chip of claim 13 further comprising a metal film with an edge shared with the front facet, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.
15. The laser chip of claim 12 further comprising a metal film with an edge shared with the front facet, the metal film indicating a position of the active region to align the active region relative to the waveguide along the plane parallel to the waveguide.