Polarization apparatus
A polarization apparatus includes a conductive carrier, a dielectric barrier discharge (DBD) plasma source, an electric net, a DBD power supply, and a DC power supply. The conductive carrier has a carrying surface which is configured to carry a work piece. The work piece includes a piezoelectric material film, and the conductive carrier is grounded. The DBD plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film. The electric net is disposed between the carrying surface and the DBD plasma source. The DBD power supply includes a first electrode and a second electrode, in which the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded. The DC power supply includes a third electrode and a fourth electrode. The third electrode is electrically connected to the electric net, and the fourth electrode is grounded.
1. A polarization apparatus, comprising:
a conductive carrier having a carrying surface configured to carry a work piece, wherein the work piece comprises a piezoelectric material film, and the conductive carrier is grounded;
a dielectric barrier discharge (DBD) plasma source disposed over the carrying surface and configured to apply plasma toward the piezoelectric material film;
an electric net disposed between the carrying surface and the DBD plasma source;
a DBD power supply comprising a first electrode and a second electrode, wherein the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded; and
a DC power supply comprising a third electrode and a fourth electrode, wherein the third electrode is electrically connected to the electric net, and the fourth electrode is grounded.
2. The polarization apparatus of claim 1 , wherein the DBD plasma source comprises:
an electrode electrically connected to the first electrode; and
a dielectric layer connected to a bottom surface of the electrode.
3. The polarization apparatus of claim 1 , wherein the electric net comprises a grid structure consisting of a plurality of lines, and the lines are arranged at a predetermined pitch.
4. The polarization apparatus of claim 1 , further comprising:
a DC bias power supply comprising a fifth electrode and a sixth electrode, wherein the fifth electrode is electrically connected to the conductive carrier, and the sixth electrode is grounded to provide the conductive carrier with a bias.
5. The polarization apparatus of claim 1 , wherein an extending direction of the electric net is parallel to the carrying surface of the conductive carrier.
6. The polarization apparatus of claim 1 , wherein the work piece further comprises a conductive substrate, and the piezoelectric material film covers a surface of the conductive substrate.
7. A polarization apparatus, comprising:
at least one conductive conveying mechanism configured to convey a continuous work piece toward a direction, wherein the continuous work piece comprises a piezoelectric material film, and the at least one conductive conveying mechanism is grounded;
at least one dielectric barrier discharge (DBD) plasma source disposed over a predetermined region of the at least one conductive conveying mechanism and configured to apply plasma toward the piezoelectric material film passing through the predetermined region;
at least one electric net disposed between the predetermined region of the at least one conductive conveying mechanism and the at least one DBD plasma source;
at least one DBD power supply, wherein each of the at least one DBD power supply comprises a first electrode and a second electrode, wherein the first electrode is electrically connected to the at least one DBD plasma source, and the second electrode is grounded; and
at least one DC power supply, wherein each of the at least one DC power supply comprises a third electrode and a fourth electrode, wherein the third electrode is electrically connected to the at least one electric net, and the fourth electrode is grounded.
8. The polarization apparatus of claim 7 , wherein the at least one conductive conveying mechanism comprises a plurality of rollers, a conveyor belt, or a plurality of rollers and a conveyor belt disposed on the rollers.
9. The polarization apparatus of claim 7 , wherein each of the at least one electric net comprises a grid structure consisting of a plurality of lines, and the lines are arranged at a predetermined pitch.
10. The polarization apparatus of claim 7 , wherein qualities of the at least one electric net and the at least one DBD plasma source are the same.
11. The polarization apparatus of claim 7 , further comprising:
at least one DC bias power supply, wherein each of the at least one DC bias power supply comprises a fifth electrode and a sixth electrode, the fifth electrode is electrically connected to the at least one conductive conveying mechanism, and the sixth electrode is grounded to provide the at least one conductive conveying mechanism with a bias.
12. The polarization apparatus of claim 7 , wherein each of the at least one DBD plasma source comprises:
an electrode electrically connected to the first electrode; and
a dielectric layer connected to a bottom surface of the electrode.
13. The polarization apparatus of claim 7 , wherein the continuous work piece further comprises a conductive substrate, and the piezoelectric material film covers a surface of the conductive substrate.
14. A polarization apparatus, comprising:
a first roller configured to roll and carry a continuous work piece, wherein the continuous work piece comprises a piezoelectric material film, and the first roller is grounded;
at least one dielectric barrier discharge (DBD) plasma source disposed over the first roller and configured to apply plasma toward the piezoelectric material film;
an electric net disposed between the first roller and the DBD plasma source;
a second roller configured to receive and roll the continuous work piece which is from the first roller and passes through the plasma;
a DBD power supply comprising a first electrode and a second electrode, wherein the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded; and
a DC power supply comprising a third electrode and a fourth electrode, wherein the third electrode is electrically connected to the electric net, and the fourth electrode is grounded.
15. The polarization apparatus of claim 14 , wherein the continuous work piece comprises:
a conductive substrate; and
the piezoelectric material film covering a surface of the conductive substrate.
16. The polarization apparatus of claim 14 , wherein the continuous work piece is consisting of the piezoelectric material film.
17. The polarization apparatus of claim 14 , further comprising:
a DC bias power supply comprising a fifth electrode and a sixth electrode, wherein the fifth electrode is electrically connected to the first roller, and the sixth electrode is grounded to provide the first roller with a bias.
18. The polarization apparatus of claim 14 , wherein the electric net comprises a grid structure consisting of a plurality of lines, and the lines are arranged at a predetermined pitch.
19. The polarization apparatus of claim 14 , wherein the electric net extends along a length direction of the first roller.
20. The polarization apparatus of claim 14 , wherein the DBD plasma source comprises:
an electrode electrically connected to the first electrode; and
a dielectric layer connected to a bottom surface of the electrode.