Unit pixel of image sensor and light-receiving element thereof
View Patent ↗Provided are a light-receiving element which has more capability of detecting wavelengths than that of existing silicon light-receiving elements and a unit pixel of an image sensor by using it. The light-receiving element includes: a light-receiving unit which is floated or connected to external voltage and absorbs light; an oxide film which is formed to come in contact with a side of the light-receiving unit; a source and a drain which stand off the light-receiving unit with the oxide film in between and face each other; a channel which is formed between the source and the drain and forms an electric current between the source and the drain; and a wavelength expanding layer which is formed in at least one among the light-receiving unit, the oxide film and the channel and forms a plurality of local energy levels by using strained silicon.
1. A light-receiving element having characteristics of wavelength expansion, comprising:
a light-receiving unit which absorbs light;
an oxide film which contacts a side of the light-receiving unit;
a source and a drain which stand off the light-receiving unit with the oxide film in between the source and the drain, and the source and the drain facing each other;
a channel region formed between the source and the drain such that an electric current can be formed between the source and the drain; and
at least one wavelength expanding layer, formed in at least one among the light-receiving unit, the oxide film, and the channel region, and the at least one wavelength expanding layer splits energy levels to form a plurality of local energy levels,
wherein the wavelength expanding layer splits the energy levels of the conduction band and the valence band according to a direction of a crystal lattice arrangement of the wavelength expanding layer.
2. The light-receiving element of claim 1 , wherein the light-receiving element is formed on a silicon substrate in which first-type impurities are doped.
3. The light-receiving element of claim 2 , wherein the source and the drain are formed on a well in which second-type impurities are doped and the well is floated.
4. The light-receiving element of claim 1 , wherein the light-receiving unit is electrically insulated from the source and the drain by the oxide film; and
when a local energy level condition of at least one of the plurality of local energy levels is met, electrons excited by received light flow into the light-receiving unit under a tunneling effect.
5. The light-receiving element of claim 1 , comprising a plurality of the wavelength expanding layers, which are different from each other in terms of at least one of their formation location and manufacturing process.
6. The light-receiving element of claim 1 , wherein the wavelength expanding layer is formed by bonding heteroatoms to or injecting ions into a silicon crystal which forms the light-receiving unit or the channel region.
7. The light-receiving element of claim 1 , wherein a size of the light-receiving unit corresponds to a de Broglie wavelength of an electron.
8. The light-receiving element of claim 1 , further comprising a terminal which applies gate voltage to the light-receiving unit so as to control a threshold voltage and any output signals by controlling a gap between a Fermi level and an intrinsic level of the channel region.
9. The light-receiving element of claim 1 , wherein a tunneling effect occurs in an oxide film zone between any one of the channel region and the drain, and the light-receiving unit.
10. A light-receiving element having characteristics of wavelength expansion, comprising:
a light-receiving unit which absorbs light;
an oxide film which contacts a side of the light-receiving unit;
a source and a drain which stand off the light-receiving unit with the oxide film in between the source and the drain, and the source and the drain facing each other;
a channel region formed between the source and the drain such that an electric current can be formed between the source and the drain; and
at least one wavelength expanding layer, formed in at least one among the light-receiving unit, the oxide film, and the channel region, and the at least one wavelength expanding layer splits energy levels to form a plurality of local energy levels,
wherein the wavelength expanding layer is formed by applying stress onto an interface of a silicon layer and the oxide film.