Nitride semiconductor substrate and method of manufacturing the same
The present invention provides a nitride semiconductor substrate suitable for a high frequency device. The nitride semiconductor substrate has a substrate, a buffer layer made of group 13 nitride semiconductors, and an active layer made of group 13 nitride semiconductors in this order, wherein the substrate is composed of a first substrate made of polycrystalline aluminum nitride, and a second substrate made of Si single crystal having a specific resistance of 100 Ω·cm or more, formed on the first substrate, the average particle size of AlN constituting the first substrate is 3 to 9 μm, and preferably, the second substrate grown by the MCZ method has an oxygen concentration of 1E+18 to 9E+18 atoms/cm 3 and a specific resistance of 100 to 1000 Ω·cm.
1. A nitride semiconductor substrate having a substrate, a buffer layer made of group 13 nitride semiconductors on the substrate, and an active layer made of group 13 nitride semiconductors on the buffer layer, wherein
the buffer layer has a silicon element concentration profile having one peak in the thickness direction of the buffer layer, has a carbon element concentration profile having one peak in the thickness direction of the buffer layer, and has at least one pair of peaks having a width of 0 to 50 nm between the two peaks.