Diamond crystal substrate, method for producing diamond crystal substrate, and method for homo-epitaxially growing diamond crystal
A diamond crystal substrate has a substrate surface that is one crystal plane among (100), (111), and (110) and that has atomic steps and terraces structure at an off-angle of 7° or less excluding 0°.
1. A diamond crystal substrate having a substrate surface that is one crystal plane among (100), (111), and (110) and that has atomic steps and terraces structure at an off-angle of 7° or less excluding 0°,
wherein the diamond crystal substrate has a surface roughness of 5 nm or less.
2. The diamond crystal substrate according to claim 1 , wherein the off-angle is 5° or less.
3. The diamond crystal substrate according to claim 2 , wherein the off-angle is 3° or less.
4. The diamond crystal substrate according to claim 1 , wherein the off-angle is 3° or less.
5. A diamond crystal substrate having:
a substrate surface that is one crystal plane among (100), (111), and (110) and that has terraces connected to form atomic steps at an off-angle of 7° or less excluding 0°; and
a diamond crystal formed on the substrate surface,
wherein the diamond crystal substrate has a surface roughness of 5 nm or less.
6. The diamond crystal substrate according to claim 5 , wherein the off-angle is 5° or less.
7. The diamond crystal substrate according to claim 6 , wherein the off-angle is 3° or less.
8. The diamond crystal substrate according to claim 5 , wherein the off-angle is 3° or less.