Photoacid generator
The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×10 7 ·cm 2 /mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.
1. A computer-implemented method comprising:
generating an acid, wherein generating an acid comprises:
applying a photoresist composition to a substrate, wherein the photoresist has increased sensitivity to EUV light by adding a photoacid generator having an element X, wherein X has a large absorption cross section at 92 eV photos of at least 0.5×10 7 cm 2 /mol and has at least two stable oxidation states; and
irradiating the photoresist composition with an energy ray to cause the photoacid generator to generate an acid.
2. The computer-implemented method according to claim 1 , wherein the energy ray is a deep ultraviolet (DUV) irradiation or an extreme ultraviolet (EUV) irradiation.
3. The computer-implemented method of claim 1 , further comprising:
forming a patterned materials features on a substrate, wherein forming a patterned materials features on a substrate comprises:
providing a material surface on a substrate;
forming a layer of the photoresist composition over said material surface;
patternwise irradiating the photoresist layer with an energy ray thereby creating a pattern of radiation-exposed regions in said photoresist layer;
selectively removing portions of said photoresist layer to form exposed portions of said material surface; and
etching or ion implanting said exposed portions of said material, thereby forming said patterned material feature.
4. The computer-implemented method according to claim 2 , wherein the energy ray is a deep ultraviolet (DUV) irradiation or an extreme ultraviolet (EUV) irradiation.