Semiconductor device
A semiconductor device includes an active region configured by a first MOS structure region and a second MOS structure region, a gate ring region surrounding a periphery of the active region, a first ring region surrounding a periphery of the gate ring region, a second ring region surrounding a periphery of the first ring region, and a termination region surrounding a periphery of the second ring region. The semiconductor device has first first-electrodes in the first MOS structure region, second first-electrodes in the second MOS structure region, a third first-electrode in the first ring region, and a fourth first-electrode in the second ring region. The third first-electrode has a potential equal to that of the second first-electrodes, and the fourth first-electrode has a potential equal to that of the first first-electrodes.
1. A semiconductor device having, in a top view thereof,
an active region configured by a first MOS (metal oxide semiconductor) structure region and a second MOS structure region,
a gate ring region surrounding a periphery of the active region,
a first ring region surrounding a periphery of the gate ring region,
a second ring region surrounding a periphery of the first ring region, and
a termination region surrounding a periphery of the second ring region,
the semiconductor device comprising:
a semiconductor substrate of a first conductivity type, having a front surface and a back surface;
a first semiconductor layer of the first conductivity type, provided on the front surface of the semiconductor substrate and having an impurity concentration lower than that of the semiconductor substrate, the first semiconductor layer having a first surface and a second surface that are opposite to each other, the second surface thereof facing the semiconductor substrate;
in the active region and the gate ring region:
a first second-semiconductor layer of a second conductivity type, provided on the first surface of the first semiconductor layer and having a first surface and a second surface that are opposite to each other, the second surface thereof facing the semiconductor substrate;
in the first MOS structure region:
a plurality of first first-semiconductor regions of the first conductivity type, selectively provided in the first second-semiconductor layer at the first surface thereof,
a plurality of first gate insulating films each having a first surface and a second surface that are opposite to each other, the second surface thereof being in contact with the first second-semiconductor layer,
a plurality of first gate electrodes respectively provided on the first surfaces of the first gate insulating films, and
a plurality of first first-electrodes provided on the first surface of the first second-semiconductor layer and surfaces of the first first-semiconductor regions;
in the second MOS structure region:
a second second-semiconductor layer of the second conductivity type, provided on the first surface of the first semiconductor layer and having a first surface and a second surface that are opposite to each other, the second surface thereof facing the semiconductor substrate,
a plurality of second first-semiconductor regions of the first conductivity type, selectively provided in the second second-semiconductor layer at the first surface thereof,
a plurality of second gate insulating films each having a first surface and a second surface that are opposite to each other, the second surface thereof being in contact with the second second-semiconductor layer,
a plurality of second gate electrodes respectively provided on the first surfaces of the second gate insulating films, and
a plurality of second first-electrodes provided on the first surface of the second second-semiconductor layer and surfaces of the second first-semiconductor regions;
in the gate ring region:
an insulating film having a first surface and a second surface that are opposite to each other, the second surface thereof being in contact with the first second-semiconductor layer,
a third gate electrode provided on the first surface of the insulating film, and
a gate wiring electrode provided on the third gate electrode;
in the first ring region:
a third second-semiconductor layer of the second conductivity type, provided on the first surface of the first semiconductor layer, and
a third first-electrode provided on a surface of the third second-semiconductor layer;
in the second ring region:
a fourth second-semiconductor layer of the second conductivity type, provided on the first surface of the first semiconductor layer, and
a fourth first-electrode provided on a surface of the fourth second-semiconductor layer; and
a second electrode provided on the back surface of the semiconductor substrate, wherein
the third first-electrode has a potential thereof equal to that of the second first-electrodes, and
the fourth first-electrode has a potential thereof equal to that of the first first-electrodes.
2. The semiconductor device according to claim 1 , wherein
the second second-semiconductor layer and the third second-semiconductor layer are connected to each other, and
the first second-semiconductor layer and the fourth second-semiconductor layer are connected to each other.
3. The semiconductor device according to claim 1 , further comprising:
a first short-circuit region electrically connecting the first first-electrodes and the fourth first-electrode; and
a second short-circuit region electrically connecting the second first-electrodes and the third first-electrode.
4. The semiconductor device according to claim 1 , further comprising:
a Zener diode region between the gate ring region and the first ring region in the top view, wherein
a part of each of the semiconductor substrate, the first semiconductor layer, the first second-semiconductor layer and the insulating film is formed in the Zener diode region, and
the semiconductor device further includes, in the Zener diode region, a Zener diode provided on the first surface of the insulating film, the Zener diode having a plurality of second semiconductor regions of the second conductivity type and a plurality of third semiconductor regions of the first conductivity type alternately arranged therein, wherein
the Zener diode includes a first Zener diode having a first end thereof electrically connected to the second first-electrodes and a second end thereof electrically connected to the third first-electrode.
5. The semiconductor device according to claim 4 , wherein
the Zener diode further includes a second Zener diode having a first end thereof electrically connected to the first first-electrodes and a second end thereof electrically connected to the fourth first-electrode.
6. The semiconductor device according to claim 1 , wherein
the plurality of second first-semiconductor regions, the plurality of second gate insulating films, the plurality of second gate electrodes, the plurality of second first-electrodes, and a part of each of the semiconductor substrate, the first semiconductor layer, the second second-semiconductor layer and the second electrode that is in the second MOS structure region, form a second MOS structure, and
the second MOS structure detects overcurrent flowing in the first MOS structure region.
7. The semiconductor device according to claim 1 , further comprising:
in the first MOS structure region, a plurality of first trenches that penetrate the first first-semiconductor regions and the first second-semiconductor layer and reach the first semiconductor layer, the first gate electrodes being provided in the first trenches via the first gate insulating films, respectively, and
in the second MOS structure region, a plurality of second trenches that penetrate the second first-semiconductor regions and the second second-semiconductor layer and reach the first semiconductor layer, the second gate electrodes being provided in the second trenches via the second gate insulating films, respectively.
8. The semiconductor device according to claim 1 , wherein
each of the semiconductor substrate, the first semiconductor layer and the second electrode is formed in all of the active region, the gate ring region, the first ring region, the second ring, and the termination region.
9. The semiconductor device according to claim 8 , wherein
the plurality of first first-semiconductor regions, the plurality of first gate insulating films, the plurality of first gate electrodes, the plurality of first first-electrodes, and a part of each of the semiconductor substrate, the first semiconductor layer, the first second-semiconductor layer and the second electrode that is in the first MOS structure region, form a first MOS structure.
10. The semiconductor device according to claim 8 , wherein
the plurality of second first-semiconductor regions, the plurality of second gate insulating films, the plurality of second gate electrodes, the plurality of second first-electrodes, and a part of each of the semiconductor substrate, the first semiconductor layer, the second second-semiconductor layer and the second electrode that is in the second MOS structure region, form a second MOS structure.