Apparatuses and methods for compute components formed over an array of memory cells
The present disclosure includes apparatuses and methods related to compute components formed over an array of storage elements. An example apparatus comprises a base substrate material and an array of memory cells formed over the base substrate material. The array can include a plurality of access transistors comprising a first semiconductor material. A compute component can be formed over and coupled to the array. The compute component can include a plurality of compute transistors comprising a second semiconductor material. The second semiconductor material can have a higher concentration of doping ions than the first semiconductor material.
1. An apparatus, comprising:
an array of memory cells comprising a first plurality of transistors comprising a first semiconductor material; and
a compute component formed over the array of memory cells and comprising a second plurality of transistors comprising a second semiconductor material having a different concentration of doping ions than the first semiconductor material,
wherein the second semiconductor material has a higher concentration of doping ions than the first semiconductor material.
2. The apparatus of claim 1 , further comprising a plurality of metal interconnects interconnecting the first plurality of transistors, the array of memory cells, and the compute component.
3. The apparatus of claim 1 , wherein the first semiconductor material comprises an amorphous silicon first semiconductor material, and
wherein the second semiconductor material comprises an amorphous silicon second semiconductor material.
4. The apparatus of claim 1 , further comprising global metal interconnects and pads formed on the compute component.
5. The apparatus of claim 1 , further comprising a sense amplifier coupled to the compute component, wherein the first plurality of transistors selectably couple respective memory cells of the array to the sense amplifier.
6. The apparatus of claim 5 , wherein the sensing circuitry is configured to perform logic operations on data stored in the array of memory cells using at least one of the second plurality of transistors.
7. A method, comprising:
forming, over an array of storage elements, a plurality of transistors comprising a semiconductor material;
doping the semiconductor material to a higher concentration of doping ions than a concentration of doping ions of another semiconductor material of the array of storage elements; and
forming sensing circuitry in the semiconductor material.
8. The method of claim 7 , wherein forming the plurality of transistors comprises forming an amorphous silicon material over the array of storage elements.
9. The method of claim 7 , further comprising doping the semiconductor material subsequent to all heating cycles associated with forming the array of storage elements.
10. The method of claim 7 , wherein forming the sensing circuitry comprises:
forming a compute component; and
forming a sense amplifier coupled to the compute component.
11. The method of claim 10 , further comprising forming a plurality of metal interconnects coupled to the plurality of transistors, the array of storage elements, and the compute component.
12. A method, comprising:
forming, over an array of storage elements, a first plurality of transistors comprising a first semiconductor material and a second plurality of transistors comprising a second semiconductor material,
wherein the second semiconductor material has a different concentration of doping ions than the first semiconductor material corresponding to a higher leakage current of the second plurality of transistors than that of the first plurality of transistors.
13. The method of claim 12 , wherein the second semiconductor material has a higher concentration of doping ions than the first semiconductor material.
14. The method of claim 12 , wherein the second semiconductor material has a lower concentration of doping ions than the first semiconductor material.
15. An apparatus, comprising:
an array of memory cells comprising a first plurality of transistors comprising a first semiconductor material; and
a compute component formed over the array of memory cells and comprising a second plurality of transistors comprising a second semiconductor material having a different concentration of doping ions than the first semiconductor material,
wherein the second semiconductor material has a lower concentration of doping ions than the first semiconductor material.
16. An apparatus, comprising:
an array of memory cells comprising a first plurality of transistors comprising a first semiconductor material; and
a compute component formed over the array of memory cells and comprising a second plurality of transistors comprising a second semiconductor material having a different concentration of doping ions than the first semiconductor material,
wherein the different concentration of doping ions corresponds to a shorter refresh cycle of the second plurality of transistors than that of the first plurality of transistors.
17. A method, comprising:
forming, over an array of storage elements, a plurality of transistors comprising a semiconductor material;
doping the semiconductor material to a lower concentration of doping ions than a concentration of doping ions of another semiconductor material of the array of storage elements; and
forming sensing circuitry in the semiconductor material.