Actively clamped carrier assembly for processing tools
Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.
1. A carrier assembly, comprising:
a mask, the mask including a pattern of openings disposed through the mask, the mask including pinholes;
a carrier, the carrier including:
a magnet disposed in the carrier, the magnet magnetically coupled to the mask;
a plurality of lips, a distance between adjacent lips of the plurality of lips corresponding to a substrate to be disposed on the adjacent lips of the plurality of lips;
a plurality of pins disposed through the plurality of lips, the plurality of pins operable to surround the substrate disposed on the adjacent lips of the plurality of lips; and
alignment pins disposed in the carrier and disposed through the pinholes in the mask, the alignment pins disposed through the plurality of lips.
2. The carrier assembly of claim 1 , wherein the mask includes a pattern of openings.
3. The carrier assembly of claim 2 , wherein the pattern of openings correspond to a first region, a second region, and a third region of a waveguide combiner.
4. The carrier assembly of claim 1 , wherein the mask is a clamp ring.
5. The carrier assembly of claim 1 , wherein the mask includes a stainless steel material or a non-ferrous material.
6. The carrier assembly of claim 1 , wherein the carrier assembly is operable to be scanned vertically during processing.
7. The carrier assembly of claim 1 , wherein the carrier includes a silicon material.