IP Library › Granted Patent US 11,360,031
Granted Patent B2
US 11,360,031 · App. 17/123,901 · Granted Jun 14, 2022

Focus-less inspection apparatus and method

Inventors: Chan Kwon Lee (Ansan-si, KR); Moon Young Jeon (Seongnam-si, KR); Jung Hur (Bucheon-si, KR); Deok Hwa Hong (Gwangmyeong-si, KR); Eun Ha Jo (Gwangmyeong-si, KR)
Assignee: KOH YOUNG TECHNOLOGY INC
G01N21/9501G01N21/4738
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Quick Facts
Patent No.
US 11,360,031
App. No.
17/123,901
Granted
Jun 14, 2022
Kind
B2
Abstract

The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.

Claims (24)

1. An apparatus comprising:

a structured-light source configured to sequentially radiate a plurality of structured lights having a predetermined phase range;

at least one lens configured to adjust optical paths of the plurality of structured lights such that each of the plurality of structured lights is uniformly radiated to a region on an object;

an image sensor configured to capture a plurality of reflected lights generated by the plurality of structured lights reflected from the region;

a memory that stores reference information on an inclination of the region; and

a processor configured to:

acquire light quantity values of the plurality of reflected lights from the image sensor; and

derive an angle of the region with respect to a reference plane based on the light quantity values and the reference information.

2. The apparatus of claim 1 , wherein the reference information indicates a relation between the angle of the region and the light quantity values of the plurality of reflected lights.

3. The apparatus of claim 1 , wherein each of the plurality of structured lights includes a plurality of light beams, each of which corresponds to a phase of the phase range, and

wherein the at least one lens is further configured to adjust optical paths of the plurality of light beams of each of the plurality of structured lights.

4. The apparatus of claim 1 , wherein the phase range is greater than a half-period of the plurality of structured lights and smaller than a period of the plurality of structured lights.

5. The apparatus of claim 1 , wherein the plurality of structured lights are generated by phase-shifting one structured light by a predetermined phase interval.

6. A method, comprising:

sequentially radiating, by a structured-light source, a plurality of structured lights having a predetermined phase range;

adjusting, by at least one lens, optical paths of the plurality of structured lights such that each of the plurality of structured lights is uniformly radiated to a region on an object;

capturing, by an image sensor, a plurality of reflected lights generated by the plurality of structured lights reflected from the region;

acquiring, by a processor, light quantity values of the plurality of reflected lights from the image sensor; and

deriving, by the processor, an angle of the region with respect to a reference plane based on the light quantity values and reference information on an inclination of the region stored in a memory.

7. The method of claim 6 , wherein the reference information indicates a relation between the angle of the region and the light quantity values of the plurality of reflected lights.

8. The method of claim 6 , wherein each of the plurality of structured lights includes a plurality of light beams, each of which corresponds to a phase of the phase range, and

wherein the adjusting optical paths of the plurality of structured lights includes adjusting optical paths of the plurality of light beams of each of the plurality of structured lights.

9. The method of claim 6 , wherein the phase range is greater than a half-period of the plurality of structured lights and smaller than a period of the plurality of structured lights.

10. The method of claim 6 , wherein the plurality of structured lights are generated by phase-shifting one structured light by a predetermined phase interval.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 16, 2020
From: LEE, CHAN KWON; JEON, MOON YOUNG; HUR, JUNG; HONG, DEOK HWA; JO, EUN HA
To: KOH YOUNG TECHNOLOGY INC
Reel/Frame 054670/0667 →
Priority Claims (2)
KR 10-2018-0122354 · Oct 15, 2018 · national
KR 10-2018-0159872 · Dec 12, 2018 · national
Continuity (2)
Continuation 16653291 · Oct 15, 2019
Related Publication 20210102903A1 · Apr 8, 2021