Manufacturing process of an RF-SOI trapping layer substrate resulting from a crystalline transformation of a buried layer
A method for manufacturing a semiconductor-on-insulator type substrate for radiofrequency applications is provided, including the steps of: directly bonding a support substrate of a single crystal material and a donor substrate including a thin layer of a semiconductor material, one or more layers of dielectric material being at a bonding interface thereof; transferring the thin layer onto the support substrate; and forming an electric charge trap region in the support substrate in contact with the one or more layers of the dielectric material present at the bonding interface, by transforming a buried zone of the support substrate into a polycrystal.
1. A method for manufacturing a semiconductor-on-insulator type substrate for radiofrequency applications, comprising the steps of:
directly bonding a support substrate of a single crystal material and a donor substrate including a thin layer of a semiconductor material, one or more layers of dielectric material being at a bonding interface thereof;
transferring the thin layer onto the support substrate; and
forming an electric charge trap region in the support substrate in contact with the one or more layers of the dielectric material present at the bonding interface, by transforming a buried zone of the support substrate into a polycrystal,
wherein the transforming comprises amorphizing the buried zone of the support substrate followed by recrystallizing the buried zone into polycrystalline form.
2. The method according to claim 1 , wherein the amorphizing comprises ion implanting.
3. The method according to claim 1 , wherein the recrystallizing comprises at least one laser annealing operation causing a polycrystalline microstructure to be created in the buried zone.
4. The method according to claim 3 , wherein the recrystallizing further comprises a plurality of laser annealing operations successively recrystallizing a decreasing thickness of the buried zone.
5. The method according to claim 3 , wherein the recrystallizing further comprises, after the at least one laser annealing operation, an additional heat treatment step or an additional laser annealing operation promoting development of a polycrystalline microstructure.
6. The method according to claim 1 , further comprising, before the amorphizing, forming a layer of dielectric material at a surface of the support substrate.
7. The method according to claim 6 , wherein the forming of the layer of the dielectric material at the surface of the support substrate is performed by thermal oxidation.
8. The method according to claim 6 , wherein the amorphizing is performed in the buried zone of the support substrate located directly under the layer of the dielectric material.
9. The method according to claim 1 , wherein the donor substrate is covered with a layer of dielectric material.
10. The method according to claim 3 , wherein the amorphizing is performed after the transferring of the thin layer onto the support substrate.
11. The method according to claim 3 , wherein the at least one laser annealing operation is performed through a mask in order to form a localized polycrystalline zone forming the electric charge trap region.
12. The method according to claim 9 , further comprising, after the forming of the electric charge trap region and before the directly bonding of the substrate support and the donor substrate, a step of removing a surface layer from the substrate support.
13. The method according to claim 3 , further comprising, after the forming of the electric charge trap region and before the directly bonding of the substrate support and the donor substrate, a step of oxidizing a surface layer of the substrate support.
14. The method according to claim 12 , wherein the oxidizing step is preceded by a step of thickening the support substrate.
15. The method according to claim 1 , further comprising a step of forming pores in the buried zone of the support substrate or in a zone directly underlying the buried zone in the support substrate.
16. The method according to claim 15 , wherein the step of the forming of the pores in the buried zone of the support substrate is performed before the recrystallizing of the buried zone into polycrystalline form.
17. The method according to claim 15 , wherein the step of the forming of the pores in the buried zone is performed locally.
18. The method according to claim 1 , wherein the buried zone of the support substrate is a full wafer layer.
19. A semiconductor-on-insulator type substrate for radiofrequency applications, the semiconductor-on-insulator type substrate comprising:
a stack of a base of a single crystal semiconductor material;
an electrical charge trap layer of polycrystalline semiconductor material;
a dielectric layer directly in contact with the electrical charge trap layer and a thin layer of semiconductor material; and
a porous layer made of semiconductor material between the base and the electrical charge trap layer.
20. The semiconductor-on-insulator type substrate according to claim 19 , wherein the semiconductor material of the porous layer is a same semiconductor material as the polycrystalline semiconductor material of the electrical charge trap layer.