IP Library › Granted Patent US 11,972,931
Granted Patent B2
US 11,972,931 · App. 17/129,753 · Granted Apr 30, 2024

Light emitting sealed body, light emitting unit, and light source device

Inventors: Akio Suzuki (Hamamatsu, JP); Toru Fujita (Hamamatsu, JP); Akinori Asai (Hamamatsu, JP); Yusei Nagata (Hamamatsu, JP); Shinichi Ohba (Hamamatsu, JP); Matthew Partlow (Somerville, MA); Ron Collins (Londonderry, NH); Stephen F. Horne (Medford, MA); Laura Owens (Arlington, MA)
Assignees: Hamamatsu Photonics K.K.; Energetiq Technology, Inc.
H01J37/32513H01J37/075H01J37/32009H05H1/00H05H1/01C23C16/45544
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Quick Facts
Patent No.
US 11,972,931
App. No.
17/129,753
Granted
Apr 30, 2024
Kind
B2
Abstract

A light emitting sealed body includes a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted. The housing includes at least one flow path which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion.

Claims (47)

1. A light emitting sealed body comprising:

a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted, wherein the first light is laser light for maintaining plasma generated in the discharge gas and the second light is light from the plasma,

wherein the housing includes at least one extension space which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion, the at least one extension space being formed at an outer surface of the housing.

2. The light emitting sealed body according to claim 1 ,

wherein the outer surface of the housing is provided with at least one groove which extends toward at least one of the first window portion and the second window portion, and

wherein the extension space is configured by the at least one groove.

3. The light emitting sealed body according to claim 2 ,

wherein the at least one groove includes a pair of grooves, and

wherein the pair of grooves are formed so as to sandwich at least one of the first window portion and the second window portion.

4. The light emitting sealed body according to claim 3 ,

wherein the pair of grooves are located on the same straight line.

5. The light emitting sealed body according to claim 3 ,

wherein each of the pair of grooves is formed so as to extend from at least one of the first window portion and the second window portion to reach an edge of the outer surface of the housing.

6. The light emitting sealed body according to claim 1 ,

wherein the first window portion includes a first opening which is formed in the housing and a first window member that hermetically seals the first opening and transmits the first light,

wherein the second window portion includes a second opening which is formed in the housing and a second window member that hermetically seals the second opening and transmits the second light, and

wherein the extension space is formed so as to communicate with at least one of the first opening and the second opening.

7. The light emitting sealed body according to claim 6 ,

wherein each of the first window member and the second window member is hermetically fixed to the housing by a joining material.

8. The light emitting sealed body according to claim 7 ,

wherein the joining material is a metal brazing material.

9. The light emitting sealed body according to claim 8 ,

wherein the metal brazing material is a titanium-doped silver brazing material.

10. The light emitting sealed body according to claim 7 ,

wherein a protection layer which covers the joining material is provided at at least one of a first joining position between the first window member and the housing and a second joining position between the second window member and the housing.

11. The light emitting sealed body according to claim 6 ,

wherein the first window portion further includes a first frame member that is hermetically fixed to the housing and the second window portion further includes a second frame member that is hermetically fixed to the housing, and

wherein the first window member is hermetically joined to the first frame member and is hermetically fixed to the housing via the first frame member and the second window member is hermetically joined to the second frame member and is hermetically fixed to the housing via the second frame member.

12. A light source device comprising:

the light emitting sealed body according to claim 1 ; and

a light introduction unit which causes the first light to be incident into the first window portion.

13. A light emitting unit comprising:

a light emitting sealed body; and

a casing which stores the light emitting sealed body,

wherein the light emitting sealed body includes a housing which stores a discharge gas and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted, wherein the first light is laser light for maintaining plasma generated in the discharge gas and the second light is light from the plasma, and

wherein the housing is fixed to the casing, a flow path for supplying a fluid is provided between the housing and the casing, and the flow path extends toward at least one of the first window portion and the second window portion.

14. The light emitting unit according to claim 13 ,

wherein an outer surface of the housing is provided with at least one groove formed toward at least one of the first window portion and the second window portion, and

wherein the flow path is configured by the at least one groove.

15. The light emitting unit according to claim 13 ,

wherein an inner surface of the casing is provided with at least one groove formed toward at least one of the first window portion and the second window portion, and

wherein the flow path is configured by the at least one groove.

16. A light emitting sealed body comprising:

a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted, wherein the first light is laser light for maintaining plasma generated in the discharge gas and the second light is light from the plasma, wherein the first window portion includes a first opening which is formed in the housing and a first window member that hermetically seals the first opening and transmits the first light, and wherein the second window portion includes a second opening which is formed in the housing and a second window member that hermetically seals the second opening and transmits the second light,

wherein the housing includes at least one extension space which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion, wherein the extension space is formed so as to communicate with at least one of the first opening and the second opening,

wherein each of the first window member and the second window member is hermetically fixed to the housing by a joining material, and

wherein a protection layer which covers the joining material is provided at at least one of a first joining position between the first window member and the housing and a second joining position between the second window member and the housing.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 19, 2021
From: SUZUKI, AKIO; FUJITA, TORU; ASAI, AKINORI; NAGATA, YUSEI; OHBA, SHINICHI; PARTLOW, MATTHEW; COLLINS, RON; HORNE, STEPHEN F.; OWENS, LAURA
To: HAMAMATSU PHOTONICS K.K.; ENERGETIQ TECHNOLOGY, INC.
Reel/Frame 055341/0626 →
Continuity (1)
Related Publication 20220199372A1 · Jun 23, 2022