IP Library › Granted Patent US 11,473,903
Granted Patent B2
US 11,473,903 · App. 17/146,192 · Granted Oct 18, 2022

Surface sensing systems and methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy

Inventors: Jeffrey H. Hunt (Thousand Oaks, CA); Jianing Shi (Sunnyvale, CA); John Paul Changala (Tustin, CA)
Assignees: The Boeing Company; FemtoMetrix, Inc.
G01B11/24G01J3/10G01J3/108G01J3/44G01N21/636G01N21/65G01J2003/102G01N2021/638G01N2021/655G01N2201/103G01N2201/105
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Quick Facts
Patent No.
US 11,473,903
App. No.
17/146,192
Granted
Oct 18, 2022
Kind
B2
Abstract

Surface sensing methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The methods include exposing a sampled location of the scanned surface to a visible light beam and exposing the sampled location to a tunable infrared beam such that the tunable infrared beam is at least partially coincident with the visible light beam. The methods also include varying a frequency of the tunable infrared beam an inducing optical resonance within an imaged structure that extends at least partially within the sampled location. The methods further include receiving at least a portion of an emitted light beam from the sampled location and scanning the visible light beam and the runnable infrared beam across the scanned portion of the scanned surface. The methods also include generating an image of the scanned portion of the scanned surface based upon the receiving and the scanning.

Claims (46)

1. A method for imaging a scanned surface of a sample, the method comprising:

exposing a sampled location of the scanned surface to a visible light beam;

exposing the sampled location of the scanned surface to a tunable infrared (IR) beam such that the tunable IR beam is at least partially coincident with the visible light beam;

varying a frequency of the tunable IR beam;

inducing optical resonance within an imaged structure that extends at least partially within the sampled location of the scanned surface;

receiving at least a portion of an emitted light beam, which includes a sum frequency signal between the visible light beam and the tunable IR beam, from the sampled location of the scanned surface with a light detection system; and

generating a two-dimensional image of the scanned surface, wherein the generating is based, at least in part, on the receiving.

2. The method of claim 1 , wherein the method further includes varying at least one property of the visible light beam.

3. The method of claim 2 , wherein the at least one property of the visible light beam includes an intensity of the visible light beam.

4. The method of claim 1 , wherein the two-dimensional image is representative of at least one of a second-order susceptibility of the scanned surface and a third-order susceptibility of the scanned surface.

5. The method of claim 4 , wherein the second-order susceptibility is indicative of second harmonic generation of the scanned surface.

6. The method of claim 1 , wherein the method further includes selectively varying an output spectrum of the tunable IR beam.

7. The method of claim 1 , wherein the method further includes selectively varying an intensity of the tunable IR beam.

8. The method of claim 1 , wherein the method further includes scanning the visible light beam and the tunable IR beam across a scanned portion of the scanned surface.

9. The method of claim 8 , wherein the scanning includes scanning while continuing at least the exposing the sampled location to the visible light beam, the exposing the sampled location to the tunable IR beam, and the receiving at least the portion of the emitted light beam.

10. The method of claim 8 , wherein the scanning includes scanning while maintaining the tunable IR beam at least partially coincident on the scanned surface with the visible light beam.

11. A surface sensing system for imaging a scanned surface of a sample, the system comprising:

a sample holder including a support surface configured to support the sample;

a visible light source configured to direct a visible light beam incident upon a sampled location on the scanned surface when the sample is supported by the support surface;

a tunable infrared (IR) source configured to direct a tunable IR beam coincident with the visible light beam incident upon the sampled location on the scanned surface when the sample is supported by the support surface, wherein the tunable IR source further is configured to selectively vary a wavelength of the tunable IR beam to permit the tunable IR beam to selectively induce resonance within an imaged structure that is positioned on the scanned surface;

a light filter configured to receive an emitted light beam, which includes a sum frequency signal between the visible light beam and the tunable IR beam, from the scanned surface and to filter the emitted light beam to generate a filtered light beam, wherein the emitted light beam is emitted from the scanned surface responsive to both the visible light beam and the tunable IR beam being incident on the scanned surface;

a light detection system configured to receive the filtered light beam from the light filter;

an alignment structure configured to operatively align at least two of:

(i) the visible light source;

(ii) the tunable IR source;

(iii) the sample holder;

(iv) the light detection system; and

(v) the light filter; and

a controller programmed to control operation of the surface sensing system according to the method of claim 1 .

12. The system of claim 11 , wherein the visible light source includes a visible light source control assembly configured to selectively vary at least one property of the visible light beam.

13. The system of claim 12 , wherein the at least one property of the visible light beam includes an intensity of the visible light beam.

14. The system of claim 11 , wherein the filtered light beam is indicative of at least one of a second-order susceptibility of the scanned surface and a third-order susceptibility of the scanned surface.

15. The system of claim 14 , wherein the second-order susceptibility is indicative of second harmonic generation of the scanned surface.

16. The system of claim 11 , wherein the tunable IR source has a selectively variable output spectrum.

17. The system of claim 11 , wherein the tunable IR source is configured to selectively vary an intensity of the tunable IR beam.

18. The system of claim 11 , wherein the system further includes a scanning structure configured to scan the visible light beam and the tunable IR beam across the scanned surface to selectively vary a portion of the scanned surface that defines the sampled location.

19. The system of claim 18 , wherein the scanning structure is configured to at least one of:

(i) move the visible light beam relative to the scanned surface;

(ii) move the tunable IR beam relative to the scanned surface; and

(iii) concurrently move the tunable IR beam and the visible light beam relative to the scanned surface.

20. The system of claim 18 , wherein the scanning structure is configured to at least one of:

(i) operatively translate the sample holder relative to the visible light beam;

(ii) operatively translate the sample holder relative to the tunable IR beam;

(iii) operatively translate the sample holder relative to both the visible light beam and the tunable IR beam;

(iv) move the visible light source independently of the tunable IR source; and

(v) move the tunable IR source independently of the visible light source.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2021
From: HUNT, JEFFREY H.
To: THE BOEING COMPANY
Reel/Frame 054880/0811 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2021
From: SHI, JIANING
To: FEMTOMETRIX, INC.
Reel/Frame 054881/0067 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2021
From: CHANGALA, JOHN PAUL
To: FEMTOMETRIX, INC.
Reel/Frame 054881/0074 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2021
From: THE BOEING COMPANY; FEMTOMETRIX, INC.
To: FEMTOMETRIX, INC.; THE BOEING COMPANY
Reel/Frame 054881/0131 →
Continuity (3)
Continuation 16352569 · Mar 13, 2019
Division 15388743 · Dec 22, 2016
Related Publication 20210131797A1 · May 6, 2021
Cited By (4)
US 12,241,924 US 12,553,708 US 12,562,333 US 12,601,778