IP Library Granted Patent US 11,705,331
Granted Patent B2
US 11,705,331 · App. 17/148,729 · Granted Jul 18, 2023

Method and composition for selectively modifying base material surface

Inventors: Hiroyuki Komatsu (Tokyo, JP); Tomohiro Oda (Tokyo, JP); Hitoshi Osaki (Tokyo, JP); Masafumi Hori (Tokyo, JP); Takehiko Naruoka (Tokyo, JP)
Assignee: JSR CORPORATION
H01L21/0271C08F8/00C08F112/08C09D125/06H01L21/02118H01L21/02282H01L21/02334H01L21/02359H01L21/28H01L21/285H01L21/31133H01L21/321C08F120/14C08F2810/40C08L25/06C08L33/10C08L2203/206C08L2312/02
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Quick Facts
Patent No.
US 11,705,331
App. No.
17/148,729
Granted
Jul 18, 2023
Kind
B2
Abstract

A composition for use in selective modification of a base material surface includes a polymer having, at an end of a main chain or a side chain thereof, a group including a first functional group capable of forming a bond with a metal, and a solvent.

Claims (23)

1. A composition for selective modification of a base material surface, comprising:

a polymer comprising, at an end of a main chain or a side chain thereof, a group comprising a first functional group that forms a bond with a metal; and

a solvent dissolving or dispersing the polymer,

wherein the polymer comprises a structural unit having a crosslinkable group derived from 4-vinylbenzocyclobutene, and at least one of a structural unit derived from styrene, a structural unit derived from t-butylstyrene and a structural unit derived from methyl (meth)acrylate, and the first functional group is a primary cyano group, a sulfanyl group, an oxazoline ring-containing group, a phosphoric acid group, an epoxy group or a disulfide group.

2. The composition according to claim 1 , wherein the metal is copper, iron, zinc, cobalt, aluminum, titanium, tin, tungsten, zirconium, tantalum, germanium, molybdenum, ruthenium, gold, silver, platinum, palladium or nickel.

3. The composition according to claim 1 , wherein a polystyrene equivalent number average molecular weight of the polymer is no less than 500 and no greater than 50,000.

4. The composition according to claim 1 , wherein the first functional group is a sulfanyl group, an oxazoline ring-containing group, a phosphoric acid group, an epoxy group or a disulfide group.

5. The composition according to claim 1 , wherein the polymer comprises the structural unit derived from styrene.

6. The composition according to claim 1 , wherein the polymer comprises, at one end of the main chain thereof, the group comprising the first functional group.

7. The composition according to claim 1 , wherein the polymer comprises the structural unit derived from methyl (meth)acrylate.

8. The composition according to claim 1 , wherein the polymer comprises the structural unit derived from t-butylstyrene.

9. The composition according to claim 1 , wherein the polymer comprises the structural unit derived from styrene, the structural unit derived from t-butylstyrene, and the structural unit derived from methyl (meth)acrylate.

10. The composition according to claim 1 , wherein the polymer includes the structural unit having the crosslinkable group in a range of 0.1 mol % to 20 mol % with respect to a total of structural units constituting the polymer.

11. The composition according to claim 1 , wherein the polymer includes the structural unit having the crosslinkable group in a range of 1 mol % to 15 mol % with respect to a total of structural units constituting the polymer.

12. The composition according to claim 1 , wherein the polymer includes the structural unit having the crosslinkable group in a range of 3 mol % to 10 mol % with respect to a total of structural units constituting the polymer.

13. The composition according to claim 1 , wherein the polymer includes the structural unit having the crosslinkable group in a range of 4 mol % to 8 mol % with respect to a total of structural units constituting the polymer.

14. The composition according to claim 1 , wherein the base material surface has a first region and a second region such that the second region is substantially a non-metal.

15. The composition according to claim 14 , wherein the polymer comprises the structural unit derived from styrene, the structural unit derived from t-butylstyrene, and the structural unit derived from methyl (meth)acrylate.

16. The composition according to claim 1 , wherein the metal is a constituent of a metal substance, an alloy, an oxide, an electrically conductive nitride or a silicide.

17. The composition according to claim 16 , wherein the polymer comprises the structural unit derived from styrene.

18. The composition according to claim 16 , wherein a polystyrene equivalent number average molecular weight of the polymer is no less than 500 and no greater than 50,000.

19. The composition according to claim 16 , wherein the first functional group is a sulfanyl group, an oxazoline ring-containing group, a phosphoric acid group, an epoxy group or a disulfide group.

20. The composition according to claim 16 , wherein the polymer comprises, at one end of the main chain thereof, the group comprising the first functional group.

Assignments (2)
MERGER Recorded Mar 23, 2026
From: JSR CORPORATION
To: JICC-02, CO., LTD
Reel/Frame 075191/0149 →
CHANGE OF NAME Recorded Mar 23, 2026
From: JICC-02 CO., LTD
To: JSR CORPORATION
Reel/Frame 075192/0023 →
Priority Claims (1)
JP 2016-171340 · Sep 1, 2016 · national
Continuity (3)
Division 16288354 · Feb 28, 2019
Continuation PCTJP2017030427 · Aug 24, 2017
Related Publication 20210166935A1 · Jun 3, 2021