Spatially variable dielectric layers for digital microfluidics
A digital microfluidic device including an active matrix of propulsion electrodes controlled by thin-film-transistors. The device includes at least two areas of different propulsion electrode densities. One area may be driven by directly-driving the propulsion electrodes from a power supply or function generator. In the first, higher density region; a first dielectric layer covers the propulsion electrodes. The first dielectric layer has a first dielectric constant and a first thickness. In the second, lower density region, a second dielectric layer has a second dielectric constant and a second thickness covering the propulsion electrodes.
1. A digital microfluidic device, comprising:
a first plurality of electrodes having a first density and operatively coupled to a set of switches;
a controller operatively coupled to the set of switches and configured to provide a propulsion voltage to at least a portion of the first plurality of electrodes;
a second plurality of electrodes having a second density and configured to operate at a higher voltage than the propulsion voltage of the first plurality of electrodes;
a first dielectric layer having a first dielectric constant and a first thickness, the first dielectric layer covering the first plurality of electrodes, and
a second dielectric layer having a second dielectric constant and a second thickness, the second dielectric layer covering the second plurality of electrodes.
2. The digital microfluidic device of claim 1 , wherein the first density of the first plurality of electrodes is greater than the second density of the second plurality of electrodes.
3. The digital microfluidic device of claim 1 , wherein the first dielectric constant of the first dielectric layer is greater than the second dielectric constant of the second dielectric layer.
4. The digital microfluidic device of claim 1 , wherein the first thickness of the first dielectric layer is smaller than the second thickness of the second dielectric layer.
5. The digital microfluidic device of claim 1 , wherein the first dielectric layer and the second dielectric layer are mutually overlapping in part.
6. The digital microfluidic device of claim 1 , further comprising a third plurality of reservoir electrodes configured to operate at a higher voltage than the propulsion voltage of the first plurality of electrodes.
7. The digital microfluidic device of claim 1 , wherein the first plurality of electrodes is configured to operate at a potential between about 10 V and about 20 V.
8. The digital microfluidic device of claim 1 , wherein the second plurality of electrodes is configured to operate at a potential between about 100 V and about 300 V.
9. The digital microfluidic device of claim 1 , wherein the first dielectric layer has a thickness between about 50 nm to about 250 nm.
10. The digital microfluidic device of claim 1 , wherein the second dielectric layer has a thickness between about 500 nm to about 5 μm.
11. The digital microfluidic device of claim 1 , wherein the first plurality of electrodes is configured to operate at a first frequency and the second plurality of electrodes is configured to operate at a second frequency.
12. The digital microfluidic device of claim 11 , wherein the first frequency of operation of the first plurality of electrodes is smaller than the second frequency of operation of the second plurality of electrodes.
13. The digital microfluidic device of claim 1 , wherein the switches are thin-film-transistors.
14. The digital microfluidic device of claim 1 , wherein the switches are electro-mechanical switches.
15. The digital microfluidic device of claim 1 , wherein the first dielectric layer comprises silicon dioxide, silicon nitride, hafnium oxide, alumina, tantalum oxide, or barium strontium titanate.
16. The digital microfluidic device of claim 1 , wherein the second dielectric layer comprises parylene, ethylene tetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), titanium dioxide, or aluminum oxide.
17. The digital microfluidic device of claim 1 , wherein the second dielectric comprises a combination of layered materials selected from the group consisting of silicon dioxide, silicon nitride, hafnium oxide, alumina, tantalum oxide, barium strontium titanate, parylene, ethylene tetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), titanium dioxide, and aluminum oxide.