HEMT and method of fabricating the same
An HEMT includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer is different from the composition of the second III-V compound layer. A third III-V compound layer is disposed on the second III-V compound layer. The first III-V compound layer and the third III-V compound layer are composed of the same group III-V elements. The third III-V compound layer includes a body and numerous finger parts. Each of the finger parts is connected to the body. All finger parts are parallel to each other and do not contact each other. A source electrode, a drain electrode and a gate electrode are disposed on the first III-V compound layer.
1. A fabricating method of a high electron mobility transistor (HEMT), comprising:
forming a first III-V compound layer and a second III-V compound layer, wherein the second III-V compound layer is disposed on the first III-V compound layer, and a composition of the first III-V compound layer is different from a composition of the second III-V compound layer;
forming a third III-V compound layer disposed on the second III-V compound layer, wherein the third III-V compound layer comprises a body and a plurality of finger parts, each of the finger parts is connected to the body, all finger parts are parallel to each other; and
forming a source electrode, a drain electrode and a gate electrode, wherein the source electrode is disposed at one side of the body, the drain electrode is disposed at another side of the body and the gate electrode is disposed directly on the body, wherein steps of forming the third III-V compound layer comprises:
before forming the third III-V compound layer, forming a first protective layer covering the second III-V compound layer;
patterning the first protective layer to form a first opening which defines predetermined positions of the body and the plurality of finger parts, wherein the second III-V compound layer is exposed form the first opening;
forming a P-type III-V compound layer filling up the first opening to form the body and the plurality of finger parts;
after forming the body and the plurality of finger parts, patterning the first protective layer to form two second openings which define predetermined positions of the source electrode and the drain electrode;
forming the source electrode and the drain electrode to fill in each of the second openings, wherein the source electrode and the drain electrode contact the first III-V compound layer;
forming a second protective layer covering the first protective layer, the body, the plurality of finger parts, the source electrode, and the drain electrode;
patterning the second protective layer to form three third openings within the second protective layer, the third openings respectively defining a predetermined position of the gate electrode, exposing the source electrode and exposing the drain electrode; and
forming the gate electrode to fill in one of the third openings and contact the body.
2. The fabricating method of the HEMT of claim 1 , wherein the first III-V compound layer and the third III-V compound layer are gallium nitride, and the second III-V compound layer comprises aluminum gallium nitride, aluminum indium nitride, aluminum indium gallium nitride or aluminum indium.
3. The fabricating method of the HEMT of claim 1 , wherein the plurality of finger parts are only disposed between the body and the drain electrode.
4. The fabricating method of the HEMT of claim 1 , wherein the plurality of finger parts are only disposed between the body and the source electrode.
5. The fabricating method of the HEMT of claim 1 , wherein the plurality of finger parts are disposed between the body and the drain electrode, and between the body and the source electrode.
6. The fabricating method of the HEMT of claim 1 , wherein there is no N-type dopants within the plurality of finger parts.
7. The fabricating method of the HEMT of claim 1 , wherein the plurality of finger parts extends along a direction which moves away from the body.
8. A fabricating method of a high electron mobility transistor (HEMT), comprising:
forming a first III-V compound layer and a second III-V compound layer, wherein the second III-V compound layer is disposed on the first III-V compound layer, and a composition of the first III-V compound layer is different from a composition of the second III-V compound layer;
forming a third III-V compound layer disposed on the second III-V compound layer, wherein the third III-V compound layer comprises a body and a plurality of finger parts, each of the finger parts is connected to the body, all finger parts are parallel to each other; and
forming a source electrode, a drain electrode and a gate electrode, wherein the source electrode is disposed at one side of the body, the drain electrode is disposed at another side of the body and the gate electrode is disposed directly on the body, wherein steps of forming the third III-V compound layer comprises:
forming a P-type III-V compound layer;
patterning the P-type III-V compound layer to form the body;
after forming the body, forming an undoped III-V compound layer covering the second III-V compound layer;
patterning the undoped III-V compound layer to form the plurality of finger parts;
after forming the body and the plurality of finger parts, forming a source electrode, a drain electrode and a gate electrode, wherein the source electrode and the drain electrode contact the first III-V compound layer, and the gate electrode contacts the body.
9. The fabricating method of the HEMT of claim 8 , wherein the first III-V compound layer and the third III-V compound layer are gallium nitride, and the second III-V compound layer comprises aluminum gallium nitride, aluminum indium nitride, aluminum indium gallium nitride or aluminum indium.
10. The fabricating method of the HEMT of claim 8 , wherein the plurality of finger parts are only disposed between the body and the drain electrode.
11. The fabricating method of the HEMT of claim 8 , wherein the plurality of finger parts are only disposed between the body and the source electrode.
12. The fabricating method of the HEMT of claim 8 , wherein the plurality of finger parts are disposed between the body and the drain electrode, and between the body and the source electrode.
13. The fabricating method of the HEMT of claim 8 , wherein there is no N-type dopants within the plurality of finger parts.
14. A fabricating method of a high electron mobility transistor (HEMT), comprising:
forming a first III-V compound layer and a second III-V compound layer, wherein the second III-V compound layer is disposed on the first III-V compound layer, and a composition of the first III-V compound layer is different from a composition of the second III-V compound layer;
forming a third III-V compound layer disposed on the second III-V compound layer, wherein the third III-V compound layer comprises a body and a plurality of finger parts, each of the finger parts is connected to the body, all finger parts are parallel to each other; and
forming a source electrode, a drain electrode and a gate electrode, wherein the source electrode is disposed at one side of the body, the drain electrode is disposed at another side of the body and the gate electrode is disposed directly on the body, wherein steps of forming the third III-V compound layer comprises:
forming a P-type III-V compound layer;
patterning the P-type III-V compound layer to form the body;
forming a protective layer covering the body and the second III-V compound layer;
patterning the first protective layer to form a first opening which defines predetermined positions of the plurality of finger parts, wherein the second III-V compound layer is exposed from the first opening;
forming a undoped III-V compound layer filling up the first opening to form the plurality of finger parts;
after forming the plurality of finger parts, patterning the protective layer to form a plurality of second openings respectively defining a predetermined position of the source electrode, the drain electrode and the gate electrode; and
forming the source electrode, the drain electrode and the gate electrode to fill in each of the second openings, wherein the source electrode and the drain electrode contact the first III-V compound layer, and the gate electrode contacts the body.
15. The fabricating method of the HEMT of claim 14 , wherein the first III-V compound layer and the third III-V compound layer are gallium nitride, and the second III-V compound layer comprises aluminum gallium nitride, aluminum indium nitride, aluminum indium gallium nitride or aluminum indium.
16. The fabricating method of the HEMT of claim 14 , wherein the plurality of finger parts are only disposed between the body and the drain electrode.
17. The fabricating method of the HEMT of claim 14 , wherein the plurality of finger parts are only disposed between the body and the source electrode.
18. The fabricating method of the HEMT of claim 14 , wherein the plurality of finger parts are disposed between the body and the drain electrode, and between the body and the source electrode.
19. The fabricating method of the HEMT of claim 14 , wherein there is no N-type dopants within the plurality of finger parts.