Semiconductor device and method of manufacturing semiconductor device
The present invention provides a technology which realizes a reliable semiconductor device including a photosensor device by preventing pent roofs of edges of a P + layer from being generated and a metal wiring installed over the P + layer from coming down while securing the electrical conductivity of the P + layer. The semiconductor device includes a photosensor including a photodiode formed on a substrate. The photodiode includes: a cathode electrode; a laminated structure that is formed on the cathode electrode and in which an N + layer, an I layer, and a P + layer are laminated in this order; an anode electrode formed on the P + layer; a first insulating film formed so as to cover a portion of the anode electrode and edges of the laminated structure; and a metal wiring connected to the anode electrode. The edges of the laminated structure are formed in forward tapered shapes in a cross-sectional view.
1. A semiconductor device comprising a photosensor including a photodiode formed on a substrate,
wherein the photodiode includes:
a cathode electrode;
a laminated structure that is formed on the cathode electrode and in which an N + layer, an I layer, and a P + layer are laminated in this order;
an anode electrode formed on the P + layer;
a first insulating film formed so as to cover a portion of the anode electrode and edges of the laminated structure; and
a metal wiring connected to the anode electrode, and
the edges of the laminated structure are formed in forward tapered shapes in a cross-sectional view,
wherein each of the N + layer, the I layer, and the P + layer is formed of a-Si film,
wherein the crystallinity of the P + layer is more deteriorated in comparison with the crystallinity of the I layer, and
wherein boron ion implantation is executed on the P + layer after the P + layer is formed.
2. The semiconductor device according to claim 1 ,
wherein the photosensor includes:
a scanning line;
a detecting line;
an electric power line connected to the anode electrode via the metal wire; and
a switching TFT having a drain connected to the detecting line, a source connected to the cathode electrode, and a gate connected to the scanning line, and
the switching TFT is formed in lower layers than layers in which the photodiode is formed on the substrate.
3. The semiconductor device according to claim 1 , further comprising:
a first organic insulating film formed under the cathode electrode;
a second insulating film covering the first insulating film, a portion of the anode electrode, and the metal wiring, and
a second organic insulating film covering the second insulating film.