IP Library Granted Patent US 11,686,704
Granted Patent B2
US 11,686,704 · App. 17/172,161 · Granted Jun 27, 2023

Biosensor

Inventors: Yu-Jie Huang (Kaohsiung, TW); Jui-Cheng Huang (Hsinchu, TW); Yi-Hsing Hsiao (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
G01N27/44782B03C5/005G01N27/4145G01N27/44704
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Quick Facts
Patent No.
US 11,686,704
App. No.
17/172,161
Granted
Jun 27, 2023
Kind
B2
Abstract

A biosensor system includes an array of biosensors with a plurality of electrodes situated proximate the biosensor. A controller is configured to selectively energize the plurality of electrodes to generate a DEP force to selectively position a test sample relative to the array of biosensors.

Claims (55)

1. A biosensor system, comprising:

an array of biosensors;

a plurality of electrodes, wherein the plurality of electrodes comprises:

a first group of electrodes comprising first, second, third and fourth electrodes positioned on a common plane on respective first, second, third and fourth sides of the array of biosensors,

a second group of electrodes comprising fifth, sixth, seventh and eighth electrodes positioned on the common plane on the respective first, second, third and fourth sides of the array of biosensors, wherein the first group of electrodes is positioned outside the second group of electrodes,

a reference electrode positioned above the first, second, third, fourth, fifth, sixth, seventh and eighth electrodes, and the array of biosensors, and

a controller electrically connected to the plurality of electrodes, wherein the controller is configured to selectively energize the plurality of electrodes to generate a dielectrophoresis (DEP) force to selectively position a test sample relative to the array of biosensors; and

wherein selectively positioning the test sample comprises rotating the test sample to a selected region for sensing.

2. The biosensor system of claim 1 , wherein the controller is configured to energize the plurality of electrodes to selectively generate the DEP force to trap the test sample on the array of biosensors.

3. The biosensor system of claim 1 , wherein the controller is configured to energize the plurality of electrodes to selectively generate the DEP force to separate the test sample from the array of biosensors.

4. The biosensor system of claim 1 , wherein the controller is configured to apply a first AC signal having a first predetermined frequency to the reference electrode to establish a positive DEP to trap the test sample on the array of biosensors, and to apply a second AC signal having a second predetermined frequency to the reference electrode to establish a negative DEP to separate the test sample from the array of biosensors.

5. The biosensor system of claim 1 , wherein the controller is configured to apply an AC signal to each of the first, second, third and fourth electrodes, wherein the AC signal applied to the first electrode has a 0 degree phase angle, the AC signal applied to the second electrode has a 90 degree phase angle, the AC signal applied to the third electrode has a 180 degree phase angle, and the AC signal applied to the fourth electrode has a 270 degree phase angle to establish a DEP force to rotate the test sample about a first axis.

6. The biosensor system of claim 5 , wherein the AC signal has a predetermined frequency.

7. The biosensor system of claim 5 , wherein the controller is configured to apply a first AC signal having a first phase angle to the sixth electrode, and to apply a second AC signal having a second phase angle to the eighth electrode to establish a DEP force to rotate the test sample about a second axis perpendicular to the first axis.

8. The biosensor system of claim 7 , wherein the controller is configured to apply a third AC signal having a third phase angle to the fifth electrode, and to apply a fourth AC signal having a fourth phase angle to the seventh electrode to establish a DEP force to rotate the test sample about a third axis perpendicular to the first axis and the second axis.

9. The biosensor system of claim 1 , wherein the array of biosensors includes a plurality of backside sensing bioFETs.

10. The biosensor system of claim 1 , further comprising:

a handling substrate;

an interconnect layer over the handling substrate;

a device substrate over the interconnect layer, the device substrate including the biosensor array, wherein the array of biosensors is electrically connected to the interconnect layer.

11. The biosensor system of claim 10 , further comprising:

an isolation layer over the device substrate;

wherein the plurality of electrodes are formed over the isolation layer and extend through the isolation layer and the device substrate to the interconnect layer; and

wherein the plurality of electrodes are configured to receive an AC signal to establish the DEP force to selectively position the test sample relative to the array of biosensors.

12. The biosensor system of claim 1 , further comprising:

a fluid delivery system communicatively connected to the controller; and

wherein the controller is further configured to cause the fluid delivery system to deliver the test sample to the array of biosensors.

13. A biosensor system, comprising:

an array of biosensors;

a plurality of electrodes, wherein the plurality of electrodes comprises:

a first group of electrodes comprising first, second, third and fourth electrodes positioned on a common plane on respective first, second, third and fourth sides of the array of biosensors,

a second group of electrodes comprising fifth, sixth, seventh and eighth electrodes positioned on the common plane on the respective first, second, third and fourth sides of the array of biosensors, wherein the first group of electrodes is positioned outside the second group of electrodes,

a reference electrode positioned above the first, second, third, fourth, fifth, sixth, seventh and eighth electrodes, and the array of biosensors, and

a controller configured to apply a first AC signal having a first predetermined frequency to the reference electrode to establish a positive DEP to trap a test sample on the array of biosensors, and to apply a second AC signal having a second predetermined frequency to the reference electrode to establish a negative DEP to separate the test sample from the array of biosensors; and

wherein the controller is further configured to rotate the test sample to a selected region for sensing.

14. The biosensor system of claim 13 , wherein the controller is configured to apply an AC signal to each of the first, second, third and fourth electrodes, wherein the AC signal applied to the first electrode has a 0 degree phase angle, the AC signal applied to the second electrode has a 90 degree phase angle, the AC signal applied to the third electrode has a 180 degree phase angle, and the AC signal applied to the fourth electrode has a 270 degree phase angle to establish a DEP force to rotate the test sample about a first axis.

15. The biosensor system of claim 13 , wherein the array of biosensors includes a plurality of backside sensing bioFETs.

16. The biosensor system of claim 13 , further comprising:

a fluid delivery system communicatively connected to the controller; and

wherein the controller is further configured to cause the fluid delivery system to deliver the test sample to the array of biosensors.

17. A biosensor system, comprising:

an array of biosensors;

a plurality of electrodes, wherein the plurality of electrodes comprises:

a first group of electrodes comprising first, second, third and fourth electrodes positioned on a common plane on respective first, second, third and fourth sides of the array of biosensors,

a second group of electrodes comprising fifth, sixth, seventh and eighth electrodes positioned on the common plane on the respective first, second, third and fourth sides of the array of biosensors, wherein the first group of electrodes is positioned outside the second group of electrodes,

a reference electrode positioned above the first, second, third, fourth, fifth, sixth, seventh and eighth electrodes, and the array of biosensors, and

a controller configured to apply an AC signal to the plurality of electrodes to establish a DEP force to rotate a test sample about a first axis.

18. The biosensor system of claim 17 , wherein the controller is further configured to:

apply an AC signal to each of the first, second, third and fourth electrodes, wherein the AC signal applied to the first electrode has a 0 degree phase angle, the AC signal applied to the second electrode has a 90 degree phase angle, the AC signal applied to the third electrode has a 180 degree phase angle, and the AC signal applied to the fourth electrode has a 270 degree phase angle to establish a DEP force to rotate the test sample about the first axis.

19. The biosensor system of claim 17 , further comprising:

a fluid delivery system communicatively connected to the controller; and

wherein the controller is further configured to cause the fluid delivery system to deliver the test sample to the array of biosensors.

20. The biosensor system of claim 17 , wherein the controller is further configured to:

energize the plurality of electrodes to selectively generate the DEP force to separate the test sample from the array of biosensors; and

energize the plurality of electrodes to selectively generate the DEP force to trap the test sample on the array of biosensors.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 11, 2021
From: HUANG, YU-JIE; HUANG, JUI-CHENG; HSIAO, YI-HSING
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 055235/0225 →
Continuity (1)
Related Publication 20220252543A1 · Aug 11, 2022
Cited By (1)
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