IP Library Granted Patent US 11,355,336
Granted Patent B2
US 11,355,336 · App. 17/174,968 · Granted Jun 7, 2022

Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry

Inventors: Anton V. Ievlev (Knoxville, TN); Olga S. Ovchinnikova (Knoxville, TN); Matthias Lorenz (Toronto, CA); Yongtao Liu (Knoxville, TN)
Assignees: UT-BATTELLE, LLC; UNIVERSITY OF TENNESSEE RESEARCH FOUNDATION
H01J49/408H01J49/0031H01J49/022
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Quick Facts
Patent No.
US 11,355,336
App. No.
17/174,968
Granted
Jun 7, 2022
Kind
B2
Abstract

A method of performing time-of-flight secondary ion mass spectrometry on a sample includes the step of directing a beam of primary ions to the sample, and stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample. The stimulation of the ions is cycled between a stimulation state and a lower stimulation state. Secondary ions emitted from the sample by the beam of primary ions are collected in a time-of-flight mass spectrometer. Time-of-flight secondary ion mass spectrometry is then performed on the secondary ions. A system for performing time-of-flight secondary ion mass spectrometry on a sample is also disclosed.

Claims (21)

1. A method of performing time-of-flight secondary ion mass spectrometry on a sample, comprising the steps of:

directing a beam of primary ions to the sample;

stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample;

cycling the stimulation of the ions between a higher ion migration stimulation state and a lower ion migration stimulation state;

collecting secondary ions emitted from the sample by the beam of primary ions in a time-of-flight mass spectrometer; and,

performing time-of-flight secondary ion mass spectrometry on the secondary ions.

2. The method of claim 1 , wherein the stimulation of the ions within the sample comprises applying an electric field across the sample.

3. The method of claim 1 , wherein the stimulation of the ions within the sample comprises changing the temperature of the sample.

4. The method of claim 1 , wherein the stimulation of the ions within the sample comprises irradiating the sample with electromagnetic radiation.

5. The method of claim 4 , wherein the electromagnetic radiation comprises a laser beam.

6. The method of claim 4 , wherein the electromagnetic radiation comprises broad spectrum white light.

7. The method of claim 1 , wherein the stimulation of the ions within the sample comprises the application of mechanical force to the sample.

8. The method of claim 1 , wherein the stimulation of the ions within the sample comprises the application to the sample of a chemical species that causes ion migration within the sample.

9. The method of claim 1 , further comprising the step of collecting stimulation response data.

10. The method of claim 1 , wherein the beam of primary ions is moved across portions the sample.

11. The method of claim 1 , wherein the position where the primary ion beam intercepts the sample is controlled by a processor.

12. The method of claim 11 , wherein the processor stores position data comprising the position where the beam intercepts the sample.

13. The method of claim 12 , wherein the processor stores time-of flight secondary ion mass spectrometry data and correlates such data with the primary ion beam position data.

14. The method of claim 13 , wherein the processor stores the position data and the time-of-flight secondary ion mass spectrometry data as a function of time.

15. The method of claim 1 , wherein the primary ions comprise at least one selected from the group consisting of Bi, Ar, Au, Ga and C 60 .

16. The method of claim 1 , wherein the sample comprises at least one selected from the group consisting of ferroelectrics, memristors, photovoltaics and catalytic materials.

Assignments (3)
CONFIRMATORY LICENSE Recorded Feb 22, 2022
From: UT-BATTELLE, LLC
To: U. S. DEPARTMENT OF ENERGY
Reel/Frame 059064/0984 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2022
From: LORENZ, MATTHIAS; LIU, YONGTAO
To: UNIVERSITY OF TENNESSEE RESEARCH FOUNDATION
Reel/Frame 059045/0882 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2022
From: IEVLEV, ANTON V.; OVCHINNIKOVA, OLGA S.
To: UT-BATTELLE, LLC
Reel/Frame 059045/0955 →
Continuity (2)
Provisional Application 62976488 · Feb 14, 2020
Related Publication 20210257205A1 · Aug 19, 2021